8/14/2012	10:06:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	10:06:54 AM	Recipe started at 10:06 AM
8/14/2012	10:06:54 AM	Helium valve closed
8/14/2012	10:06:54 AM	H2 valve closed
8/14/2012	10:06:54 AM	BCl3 valve closed
8/14/2012	10:06:54 AM	PH3 valve closed
8/14/2012	10:06:54 AM	SiCl4 pre valve closed
8/14/2012	10:06:54 AM	SiCl4 post valve closed
8/14/2012	10:06:54 AM	Main Vac valve closed
8/14/2012	10:06:54 AM	Bypass valve closed
8/14/2012	10:06:54 AM	Bubbler valve closed
8/14/2012	10:06:54 AM	Helium MFC set to  0.000000
8/14/2012	10:06:54 AM	H2 MFC set to  0.000000
8/14/2012	10:06:54 AM	BCl3 MFC set to  0.000000
8/14/2012	10:06:54 AM	PH3 MFC set to  0.000000
8/14/2012	10:06:54 AM	SiCl4 MFC set to  0.000000
8/14/2012	10:06:54 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	10:06:54 AM	Tube furnace set to 0
8/14/2012	10:06:57 AM	H2 valve closed
8/14/2012	10:06:57 AM	BCl3 valve closed
8/14/2012	10:06:57 AM	PH3 valve closed
8/14/2012	10:06:57 AM	SiCl4 pre valve closed
8/14/2012	10:06:57 AM	SiCl4 post valve closed
8/14/2012	10:06:57 AM	Main Vac valve closed
8/14/2012	10:06:57 AM	Bypass valve closed
8/14/2012	10:06:57 AM	Bubbler valve closed
8/14/2012	10:06:57 AM	Helium valve opened
8/14/2012	10:06:57 AM	Helium MFC set to  500.000000
8/14/2012	10:06:57 AM	H2 MFC set to  0.000000
8/14/2012	10:06:57 AM	BCl3 MFC set to  0.000000
8/14/2012	10:06:57 AM	PH3 MFC set to  0.000000
8/14/2012	10:06:57 AM	SiCl4 MFC set to  0.000000
8/14/2012	10:06:57 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	10:06:57 AM	Tube furnace set to 0
8/14/2012	10:08:10 AM	Helium valve closed
8/14/2012	10:08:10 AM	H2 valve closed
8/14/2012	10:08:10 AM	BCl3 valve closed
8/14/2012	10:08:10 AM	PH3 valve closed
8/14/2012	10:08:10 AM	SiCl4 pre valve closed
8/14/2012	10:08:10 AM	SiCl4 post valve closed
8/14/2012	10:08:10 AM	Main Vac valve closed
8/14/2012	10:08:10 AM	Bypass valve closed
8/14/2012	10:08:10 AM	Bubbler valve closed
8/14/2012	10:08:10 AM	Helium MFC set to  0.000000
8/14/2012	10:08:10 AM	H2 MFC set to  0.000000
8/14/2012	10:08:10 AM	BCl3 MFC set to  0.000000
8/14/2012	10:08:10 AM	PH3 MFC set to  0.000000
8/14/2012	10:08:10 AM	SiCl4 MFC set to  0.000000
8/14/2012	10:08:10 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	10:08:10 AM	Tube furnace set to 0
8/14/2012	10:08:11 AM	Run finished at 10:08 AM
8/14/2012	10:08:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	11:04:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2012	11:04:52 AM	Recipe started at 11:04 AM
8/14/2012	11:04:52 AM	Helium valve closed
8/14/2012	11:04:52 AM	H2 valve closed
8/14/2012	11:04:52 AM	BCl3 valve closed
8/14/2012	11:04:52 AM	PH3 valve closed
8/14/2012	11:04:52 AM	SiCl4 pre valve closed
8/14/2012	11:04:52 AM	SiCl4 post valve closed
8/14/2012	11:04:52 AM	Main Vac valve closed
8/14/2012	11:04:52 AM	Bubbler valve closed
8/14/2012	11:04:52 AM	Bypass valve opened
8/14/2012	11:04:52 AM	Helium MFC set to  0.000000
8/14/2012	11:04:52 AM	H2 MFC set to  0.000000
8/14/2012	11:04:52 AM	BCl3 MFC set to  0.000000
8/14/2012	11:04:52 AM	PH3 MFC set to  0.000000
8/14/2012	11:04:52 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:04:52 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:04:52 AM	Tube furnace set to 0
8/14/2012	11:06:18 AM	Helium valve closed
8/14/2012	11:06:18 AM	H2 valve closed
8/14/2012	11:06:18 AM	BCl3 valve closed
8/14/2012	11:06:18 AM	PH3 valve closed
8/14/2012	11:06:18 AM	SiCl4 pre valve closed
8/14/2012	11:06:18 AM	SiCl4 post valve closed
8/14/2012	11:06:18 AM	Main Vac valve closed
8/14/2012	11:06:18 AM	Bubbler valve closed
8/14/2012	11:06:18 AM	Bypass valve opened
8/14/2012	11:06:18 AM	Helium MFC set to  0.000000
8/14/2012	11:06:18 AM	H2 MFC set to  0.000000
8/14/2012	11:06:18 AM	BCl3 MFC set to  0.000000
8/14/2012	11:06:18 AM	PH3 MFC set to  0.000000
8/14/2012	11:06:18 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:06:18 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:06:18 AM	Tube furnace set to 0
8/14/2012	11:06:43 AM	Helium valve closed
8/14/2012	11:06:43 AM	H2 valve closed
8/14/2012	11:06:43 AM	BCl3 valve closed
8/14/2012	11:06:43 AM	PH3 valve closed
8/14/2012	11:06:43 AM	SiCl4 pre valve closed
8/14/2012	11:06:43 AM	SiCl4 post valve closed
8/14/2012	11:06:43 AM	Bypass valve closed
8/14/2012	11:06:43 AM	Bubbler valve closed
8/14/2012	11:06:43 AM	Main Vac valve opened
8/14/2012	11:06:43 AM	Helium MFC set to  0.000000
8/14/2012	11:06:43 AM	H2 MFC set to  0.000000
8/14/2012	11:06:43 AM	BCl3 MFC set to  0.000000
8/14/2012	11:06:43 AM	PH3 MFC set to  0.000000
8/14/2012	11:06:43 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:06:43 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:06:43 AM	Tube furnace set to 0
8/14/2012	11:06:44 AM	Run finished at 11:06 AM
8/14/2012	11:06:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2012	11:08:13 AM	Helium MFC set to  10.000000
8/14/2012	11:08:14 AM	Helium valve opened
8/14/2012	11:08:41 AM	Helium valve closed
8/14/2012	11:08:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	11:09:11 AM	Recipe started at 11:09 AM
8/14/2012	11:09:11 AM	Helium valve closed
8/14/2012	11:09:11 AM	H2 valve closed
8/14/2012	11:09:11 AM	BCl3 valve closed
8/14/2012	11:09:11 AM	PH3 valve closed
8/14/2012	11:09:11 AM	SiCl4 pre valve closed
8/14/2012	11:09:11 AM	SiCl4 post valve closed
8/14/2012	11:09:11 AM	Main Vac valve closed
8/14/2012	11:09:11 AM	Bubbler valve closed
8/14/2012	11:09:11 AM	Bypass valve opened
8/14/2012	11:09:11 AM	Helium MFC set to  0.000000
8/14/2012	11:09:11 AM	H2 MFC set to  0.000000
8/14/2012	11:09:11 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:11 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:11 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:11 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:09:11 AM	Tube furnace set to 0
8/14/2012	11:09:12 AM	Helium valve closed
8/14/2012	11:09:12 AM	H2 valve closed
8/14/2012	11:09:12 AM	BCl3 valve closed
8/14/2012	11:09:12 AM	PH3 valve closed
8/14/2012	11:09:12 AM	SiCl4 pre valve closed
8/14/2012	11:09:12 AM	SiCl4 post valve closed
8/14/2012	11:09:12 AM	Main Vac valve closed
8/14/2012	11:09:12 AM	Bubbler valve closed
8/14/2012	11:09:12 AM	Bypass valve opened
8/14/2012	11:09:12 AM	Helium MFC set to  0.000000
8/14/2012	11:09:12 AM	H2 MFC set to  0.000000
8/14/2012	11:09:12 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:12 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:12 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:12 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:09:12 AM	Tube furnace set to 0
8/14/2012	11:09:14 AM	Run aborted at 11:09 AM
8/14/2012	11:09:14 AM	Helium valve closed
8/14/2012	11:09:14 AM	H2 valve closed
8/14/2012	11:09:14 AM	BCl3 valve closed
8/14/2012	11:09:14 AM	PH3 valve closed
8/14/2012	11:09:14 AM	SiCl4 pre valve closed
8/14/2012	11:09:14 AM	SiCl4 post valve closed
8/14/2012	11:09:14 AM	Bypass valve closed
8/14/2012	11:09:14 AM	Main Vac valve closed
8/14/2012	11:09:14 AM	Bubbler valve closed
8/14/2012	11:09:14 AM	Helium MFC set to  0.000000
8/14/2012	11:09:14 AM	H2 MFC set to  0.000000
8/14/2012	11:09:14 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:14 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:14 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:14 AM	Tube furnace set to 0
8/14/2012	11:09:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	11:09:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	11:09:31 AM	Recipe started at 11:09 AM
8/14/2012	11:09:31 AM	Helium valve closed
8/14/2012	11:09:31 AM	H2 valve closed
8/14/2012	11:09:31 AM	BCl3 valve closed
8/14/2012	11:09:31 AM	PH3 valve closed
8/14/2012	11:09:31 AM	SiCl4 pre valve closed
8/14/2012	11:09:31 AM	SiCl4 post valve closed
8/14/2012	11:09:31 AM	Main Vac valve closed
8/14/2012	11:09:31 AM	Bubbler valve closed
8/14/2012	11:09:31 AM	Bypass valve opened
8/14/2012	11:09:31 AM	Helium MFC set to  0.000000
8/14/2012	11:09:31 AM	H2 MFC set to  0.000000
8/14/2012	11:09:31 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:31 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:31 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:31 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:09:31 AM	Tube furnace set to 0
8/14/2012	11:09:32 AM	Helium valve closed
8/14/2012	11:09:32 AM	H2 valve closed
8/14/2012	11:09:32 AM	BCl3 valve closed
8/14/2012	11:09:32 AM	PH3 valve closed
8/14/2012	11:09:32 AM	SiCl4 pre valve closed
8/14/2012	11:09:32 AM	SiCl4 post valve closed
8/14/2012	11:09:32 AM	Main Vac valve closed
8/14/2012	11:09:32 AM	Bubbler valve closed
8/14/2012	11:09:32 AM	Bypass valve opened
8/14/2012	11:09:32 AM	Helium MFC set to  0.000000
8/14/2012	11:09:32 AM	H2 MFC set to  0.000000
8/14/2012	11:09:32 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:32 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:32 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:32 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:09:32 AM	Tube furnace set to 0
8/14/2012	11:09:35 AM	Helium valve closed
8/14/2012	11:09:35 AM	H2 valve closed
8/14/2012	11:09:35 AM	BCl3 valve closed
8/14/2012	11:09:35 AM	PH3 valve closed
8/14/2012	11:09:35 AM	SiCl4 pre valve closed
8/14/2012	11:09:35 AM	SiCl4 post valve closed
8/14/2012	11:09:35 AM	Bypass valve closed
8/14/2012	11:09:35 AM	Bubbler valve closed
8/14/2012	11:09:35 AM	Main Vac valve opened
8/14/2012	11:09:35 AM	Helium MFC set to  0.000000
8/14/2012	11:09:35 AM	H2 MFC set to  0.000000
8/14/2012	11:09:35 AM	BCl3 MFC set to  0.000000
8/14/2012	11:09:35 AM	PH3 MFC set to  0.000000
8/14/2012	11:09:35 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:09:35 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:09:35 AM	Tube furnace set to 0
8/14/2012	11:10:05 AM	H2 valve closed
8/14/2012	11:10:05 AM	BCl3 valve closed
8/14/2012	11:10:05 AM	PH3 valve closed
8/14/2012	11:10:05 AM	SiCl4 pre valve closed
8/14/2012	11:10:05 AM	SiCl4 post valve closed
8/14/2012	11:10:05 AM	Bypass valve closed
8/14/2012	11:10:05 AM	Bubbler valve closed
8/14/2012	11:10:05 AM	Helium valve opened
8/14/2012	11:10:05 AM	Main Vac valve opened
8/14/2012	11:10:05 AM	Helium MFC set to  20.000000
8/14/2012	11:10:05 AM	H2 MFC set to  0.000000
8/14/2012	11:10:05 AM	BCl3 MFC set to  0.000000
8/14/2012	11:10:05 AM	PH3 MFC set to  0.000000
8/14/2012	11:10:05 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:10:05 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:10:05 AM	Tube furnace set to 0
8/14/2012	11:10:35 AM	Helium valve closed
8/14/2012	11:10:35 AM	H2 valve closed
8/14/2012	11:10:35 AM	BCl3 valve closed
8/14/2012	11:10:35 AM	PH3 valve closed
8/14/2012	11:10:35 AM	SiCl4 pre valve closed
8/14/2012	11:10:35 AM	SiCl4 post valve closed
8/14/2012	11:10:35 AM	Bypass valve closed
8/14/2012	11:10:35 AM	Bubbler valve closed
8/14/2012	11:10:35 AM	Main Vac valve opened
8/14/2012	11:10:35 AM	Helium MFC set to  0.000000
8/14/2012	11:10:35 AM	H2 MFC set to  0.000000
8/14/2012	11:10:35 AM	BCl3 MFC set to  0.000000
8/14/2012	11:10:35 AM	PH3 MFC set to  0.000000
8/14/2012	11:10:35 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:10:35 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:10:36 AM	Tube furnace set to 0
8/14/2012	11:11:06 AM	H2 valve closed
8/14/2012	11:11:06 AM	BCl3 valve closed
8/14/2012	11:11:06 AM	PH3 valve closed
8/14/2012	11:11:06 AM	SiCl4 pre valve closed
8/14/2012	11:11:06 AM	SiCl4 post valve closed
8/14/2012	11:11:06 AM	Bypass valve closed
8/14/2012	11:11:06 AM	Bubbler valve closed
8/14/2012	11:11:06 AM	Helium valve opened
8/14/2012	11:11:06 AM	Main Vac valve opened
8/14/2012	11:11:06 AM	Helium MFC set to  20.000000
8/14/2012	11:11:06 AM	H2 MFC set to  0.000000
8/14/2012	11:11:06 AM	BCl3 MFC set to  0.000000
8/14/2012	11:11:06 AM	PH3 MFC set to  0.000000
8/14/2012	11:11:06 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:11:06 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:11:06 AM	Tube furnace set to 0
8/14/2012	11:11:36 AM	Helium valve closed
8/14/2012	11:11:36 AM	H2 valve closed
8/14/2012	11:11:36 AM	BCl3 valve closed
8/14/2012	11:11:36 AM	PH3 valve closed
8/14/2012	11:11:36 AM	SiCl4 pre valve closed
8/14/2012	11:11:36 AM	SiCl4 post valve closed
8/14/2012	11:11:36 AM	Bypass valve closed
8/14/2012	11:11:36 AM	Bubbler valve closed
8/14/2012	11:11:36 AM	Main Vac valve opened
8/14/2012	11:11:36 AM	Helium MFC set to  0.000000
8/14/2012	11:11:36 AM	H2 MFC set to  0.000000
8/14/2012	11:11:36 AM	BCl3 MFC set to  0.000000
8/14/2012	11:11:36 AM	PH3 MFC set to  0.000000
8/14/2012	11:11:36 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:11:36 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:11:36 AM	Tube furnace set to 0
8/14/2012	11:12:06 AM	H2 valve closed
8/14/2012	11:12:06 AM	BCl3 valve closed
8/14/2012	11:12:06 AM	PH3 valve closed
8/14/2012	11:12:06 AM	SiCl4 pre valve closed
8/14/2012	11:12:06 AM	SiCl4 post valve closed
8/14/2012	11:12:06 AM	Bypass valve closed
8/14/2012	11:12:06 AM	Bubbler valve closed
8/14/2012	11:12:06 AM	Helium valve opened
8/14/2012	11:12:06 AM	Main Vac valve opened
8/14/2012	11:12:06 AM	Helium MFC set to  20.000000
8/14/2012	11:12:06 AM	H2 MFC set to  0.000000
8/14/2012	11:12:06 AM	BCl3 MFC set to  0.000000
8/14/2012	11:12:06 AM	PH3 MFC set to  0.000000
8/14/2012	11:12:06 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:12:06 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:12:06 AM	Tube furnace set to 0
8/14/2012	11:12:36 AM	Helium valve closed
8/14/2012	11:12:36 AM	H2 valve closed
8/14/2012	11:12:36 AM	BCl3 valve closed
8/14/2012	11:12:36 AM	PH3 valve closed
8/14/2012	11:12:36 AM	SiCl4 pre valve closed
8/14/2012	11:12:36 AM	SiCl4 post valve closed
8/14/2012	11:12:36 AM	Bypass valve closed
8/14/2012	11:12:36 AM	Bubbler valve closed
8/14/2012	11:12:36 AM	Main Vac valve opened
8/14/2012	11:12:36 AM	Helium MFC set to  0.000000
8/14/2012	11:12:36 AM	H2 MFC set to  0.000000
8/14/2012	11:12:36 AM	BCl3 MFC set to  0.000000
8/14/2012	11:12:36 AM	PH3 MFC set to  0.000000
8/14/2012	11:12:36 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:12:36 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:12:37 AM	Tube furnace set to 0
8/14/2012	11:13:07 AM	H2 valve closed
8/14/2012	11:13:07 AM	BCl3 valve closed
8/14/2012	11:13:07 AM	PH3 valve closed
8/14/2012	11:13:07 AM	SiCl4 pre valve closed
8/14/2012	11:13:07 AM	SiCl4 post valve closed
8/14/2012	11:13:07 AM	Bypass valve closed
8/14/2012	11:13:07 AM	Bubbler valve closed
8/14/2012	11:13:07 AM	Helium valve opened
8/14/2012	11:13:07 AM	Main Vac valve opened
8/14/2012	11:13:07 AM	Helium MFC set to  20.000000
8/14/2012	11:13:07 AM	H2 MFC set to  0.000000
8/14/2012	11:13:07 AM	BCl3 MFC set to  0.000000
8/14/2012	11:13:07 AM	PH3 MFC set to  0.000000
8/14/2012	11:13:07 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:13:07 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:13:07 AM	Tube furnace set to 0
8/14/2012	11:13:37 AM	Helium valve closed
8/14/2012	11:13:37 AM	H2 valve closed
8/14/2012	11:13:37 AM	BCl3 valve closed
8/14/2012	11:13:37 AM	PH3 valve closed
8/14/2012	11:13:37 AM	SiCl4 pre valve closed
8/14/2012	11:13:37 AM	SiCl4 post valve closed
8/14/2012	11:13:37 AM	Bypass valve closed
8/14/2012	11:13:37 AM	Bubbler valve closed
8/14/2012	11:13:37 AM	Main Vac valve opened
8/14/2012	11:13:37 AM	Helium MFC set to  0.000000
8/14/2012	11:13:37 AM	H2 MFC set to  0.000000
8/14/2012	11:13:37 AM	BCl3 MFC set to  0.000000
8/14/2012	11:13:37 AM	PH3 MFC set to  0.000000
8/14/2012	11:13:37 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:13:37 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:13:37 AM	Tube furnace set to 0
8/14/2012	11:14:07 AM	H2 valve closed
8/14/2012	11:14:07 AM	BCl3 valve closed
8/14/2012	11:14:07 AM	PH3 valve closed
8/14/2012	11:14:07 AM	SiCl4 pre valve closed
8/14/2012	11:14:07 AM	SiCl4 post valve closed
8/14/2012	11:14:07 AM	Bypass valve closed
8/14/2012	11:14:07 AM	Bubbler valve closed
8/14/2012	11:14:07 AM	Helium valve opened
8/14/2012	11:14:07 AM	Main Vac valve opened
8/14/2012	11:14:07 AM	Helium MFC set to  20.000000
8/14/2012	11:14:07 AM	H2 MFC set to  0.000000
8/14/2012	11:14:07 AM	BCl3 MFC set to  0.000000
8/14/2012	11:14:07 AM	PH3 MFC set to  0.000000
8/14/2012	11:14:07 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:14:07 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:14:07 AM	Tube furnace set to 0
8/14/2012	11:14:37 AM	Helium valve closed
8/14/2012	11:14:37 AM	H2 valve closed
8/14/2012	11:14:37 AM	BCl3 valve closed
8/14/2012	11:14:37 AM	PH3 valve closed
8/14/2012	11:14:37 AM	SiCl4 pre valve closed
8/14/2012	11:14:37 AM	SiCl4 post valve closed
8/14/2012	11:14:37 AM	Bypass valve closed
8/14/2012	11:14:37 AM	Bubbler valve closed
8/14/2012	11:14:37 AM	Main Vac valve opened
8/14/2012	11:14:37 AM	Helium MFC set to  0.000000
8/14/2012	11:14:37 AM	H2 MFC set to  0.000000
8/14/2012	11:14:37 AM	BCl3 MFC set to  0.000000
8/14/2012	11:14:37 AM	PH3 MFC set to  0.000000
8/14/2012	11:14:37 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:14:37 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:14:38 AM	Tube furnace set to 0
8/14/2012	11:15:08 AM	H2 valve closed
8/14/2012	11:15:08 AM	BCl3 valve closed
8/14/2012	11:15:08 AM	PH3 valve closed
8/14/2012	11:15:08 AM	SiCl4 pre valve closed
8/14/2012	11:15:08 AM	SiCl4 post valve closed
8/14/2012	11:15:08 AM	Bypass valve closed
8/14/2012	11:15:08 AM	Bubbler valve closed
8/14/2012	11:15:08 AM	Helium valve opened
8/14/2012	11:15:08 AM	Main Vac valve opened
8/14/2012	11:15:08 AM	Helium MFC set to  20.000000
8/14/2012	11:15:08 AM	H2 MFC set to  0.000000
8/14/2012	11:15:08 AM	BCl3 MFC set to  0.000000
8/14/2012	11:15:08 AM	PH3 MFC set to  0.000000
8/14/2012	11:15:08 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:15:08 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:15:08 AM	Tube furnace set to 0
8/14/2012	11:15:38 AM	Helium valve closed
8/14/2012	11:15:38 AM	H2 valve closed
8/14/2012	11:15:38 AM	BCl3 valve closed
8/14/2012	11:15:38 AM	PH3 valve closed
8/14/2012	11:15:38 AM	SiCl4 pre valve closed
8/14/2012	11:15:38 AM	SiCl4 post valve closed
8/14/2012	11:15:38 AM	Bypass valve closed
8/14/2012	11:15:38 AM	Bubbler valve closed
8/14/2012	11:15:38 AM	Main Vac valve opened
8/14/2012	11:15:38 AM	Helium MFC set to  0.000000
8/14/2012	11:15:38 AM	H2 MFC set to  0.000000
8/14/2012	11:15:38 AM	BCl3 MFC set to  0.000000
8/14/2012	11:15:38 AM	PH3 MFC set to  0.000000
8/14/2012	11:15:38 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:15:38 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:15:38 AM	Tube furnace set to 0
8/14/2012	11:16:08 AM	H2 valve closed
8/14/2012	11:16:08 AM	BCl3 valve closed
8/14/2012	11:16:08 AM	PH3 valve closed
8/14/2012	11:16:08 AM	SiCl4 pre valve closed
8/14/2012	11:16:08 AM	SiCl4 post valve closed
8/14/2012	11:16:08 AM	Bypass valve closed
8/14/2012	11:16:08 AM	Bubbler valve closed
8/14/2012	11:16:08 AM	Helium valve opened
8/14/2012	11:16:08 AM	Main Vac valve opened
8/14/2012	11:16:08 AM	Helium MFC set to  20.000000
8/14/2012	11:16:08 AM	H2 MFC set to  0.000000
8/14/2012	11:16:08 AM	BCl3 MFC set to  0.000000
8/14/2012	11:16:08 AM	PH3 MFC set to  0.000000
8/14/2012	11:16:08 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:16:08 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:16:08 AM	Tube furnace set to 0
8/14/2012	11:16:38 AM	Helium valve closed
8/14/2012	11:16:38 AM	H2 valve closed
8/14/2012	11:16:38 AM	BCl3 valve closed
8/14/2012	11:16:38 AM	PH3 valve closed
8/14/2012	11:16:38 AM	SiCl4 pre valve closed
8/14/2012	11:16:38 AM	SiCl4 post valve closed
8/14/2012	11:16:38 AM	Bypass valve closed
8/14/2012	11:16:38 AM	Bubbler valve closed
8/14/2012	11:16:38 AM	Main Vac valve opened
8/14/2012	11:16:38 AM	Helium MFC set to  0.000000
8/14/2012	11:16:38 AM	H2 MFC set to  0.000000
8/14/2012	11:16:38 AM	BCl3 MFC set to  0.000000
8/14/2012	11:16:38 AM	PH3 MFC set to  0.000000
8/14/2012	11:16:38 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:16:38 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:16:38 AM	Tube furnace set to 0
8/14/2012	11:17:08 AM	H2 valve closed
8/14/2012	11:17:08 AM	BCl3 valve closed
8/14/2012	11:17:09 AM	PH3 valve closed
8/14/2012	11:17:09 AM	SiCl4 pre valve closed
8/14/2012	11:17:09 AM	SiCl4 post valve closed
8/14/2012	11:17:09 AM	Bypass valve closed
8/14/2012	11:17:09 AM	Bubbler valve closed
8/14/2012	11:17:09 AM	Helium valve opened
8/14/2012	11:17:09 AM	Main Vac valve opened
8/14/2012	11:17:09 AM	Helium MFC set to  20.000000
8/14/2012	11:17:09 AM	H2 MFC set to  0.000000
8/14/2012	11:17:09 AM	BCl3 MFC set to  0.000000
8/14/2012	11:17:09 AM	PH3 MFC set to  0.000000
8/14/2012	11:17:09 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:17:09 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:17:09 AM	Tube furnace set to 0
8/14/2012	11:17:39 AM	Helium valve closed
8/14/2012	11:17:39 AM	H2 valve closed
8/14/2012	11:17:39 AM	BCl3 valve closed
8/14/2012	11:17:39 AM	PH3 valve closed
8/14/2012	11:17:39 AM	SiCl4 pre valve closed
8/14/2012	11:17:39 AM	SiCl4 post valve closed
8/14/2012	11:17:39 AM	Bypass valve closed
8/14/2012	11:17:39 AM	Bubbler valve closed
8/14/2012	11:17:39 AM	Main Vac valve opened
8/14/2012	11:17:39 AM	Helium MFC set to  0.000000
8/14/2012	11:17:39 AM	H2 MFC set to  0.000000
8/14/2012	11:17:39 AM	BCl3 MFC set to  0.000000
8/14/2012	11:17:39 AM	PH3 MFC set to  0.000000
8/14/2012	11:17:39 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:17:39 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:17:39 AM	Tube furnace set to 0
8/14/2012	11:18:09 AM	H2 valve closed
8/14/2012	11:18:09 AM	BCl3 valve closed
8/14/2012	11:18:09 AM	PH3 valve closed
8/14/2012	11:18:09 AM	SiCl4 pre valve closed
8/14/2012	11:18:09 AM	SiCl4 post valve closed
8/14/2012	11:18:09 AM	Bypass valve closed
8/14/2012	11:18:09 AM	Bubbler valve closed
8/14/2012	11:18:09 AM	Helium valve opened
8/14/2012	11:18:09 AM	Main Vac valve opened
8/14/2012	11:18:09 AM	Helium MFC set to  20.000000
8/14/2012	11:18:09 AM	H2 MFC set to  0.000000
8/14/2012	11:18:09 AM	BCl3 MFC set to  0.000000
8/14/2012	11:18:09 AM	PH3 MFC set to  0.000000
8/14/2012	11:18:09 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:18:09 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:18:09 AM	Tube furnace set to 0
8/14/2012	11:18:39 AM	Helium valve closed
8/14/2012	11:18:39 AM	H2 valve closed
8/14/2012	11:18:39 AM	BCl3 valve closed
8/14/2012	11:18:39 AM	PH3 valve closed
8/14/2012	11:18:39 AM	SiCl4 pre valve closed
8/14/2012	11:18:39 AM	SiCl4 post valve closed
8/14/2012	11:18:39 AM	Bypass valve closed
8/14/2012	11:18:39 AM	Bubbler valve closed
8/14/2012	11:18:39 AM	Main Vac valve opened
8/14/2012	11:18:39 AM	Helium MFC set to  0.000000
8/14/2012	11:18:39 AM	H2 MFC set to  0.000000
8/14/2012	11:18:39 AM	BCl3 MFC set to  0.000000
8/14/2012	11:18:39 AM	PH3 MFC set to  0.000000
8/14/2012	11:18:39 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:18:39 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:18:39 AM	Tube furnace set to 0
8/14/2012	11:19:09 AM	H2 valve closed
8/14/2012	11:19:09 AM	BCl3 valve closed
8/14/2012	11:19:09 AM	PH3 valve closed
8/14/2012	11:19:09 AM	SiCl4 pre valve closed
8/14/2012	11:19:09 AM	SiCl4 post valve closed
8/14/2012	11:19:09 AM	Bypass valve closed
8/14/2012	11:19:09 AM	Bubbler valve closed
8/14/2012	11:19:09 AM	Helium valve opened
8/14/2012	11:19:09 AM	Main Vac valve opened
8/14/2012	11:19:09 AM	Helium MFC set to  20.000000
8/14/2012	11:19:09 AM	H2 MFC set to  0.000000
8/14/2012	11:19:09 AM	BCl3 MFC set to  0.000000
8/14/2012	11:19:09 AM	PH3 MFC set to  0.000000
8/14/2012	11:19:09 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:19:10 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:19:10 AM	Tube furnace set to 0
8/14/2012	11:19:40 AM	Helium valve closed
8/14/2012	11:19:40 AM	H2 valve closed
8/14/2012	11:19:40 AM	BCl3 valve closed
8/14/2012	11:19:40 AM	PH3 valve closed
8/14/2012	11:19:40 AM	SiCl4 pre valve closed
8/14/2012	11:19:40 AM	SiCl4 post valve closed
8/14/2012	11:19:40 AM	Bypass valve closed
8/14/2012	11:19:40 AM	Bubbler valve closed
8/14/2012	11:19:40 AM	Main Vac valve opened
8/14/2012	11:19:40 AM	Helium MFC set to  0.000000
8/14/2012	11:19:40 AM	H2 MFC set to  0.000000
8/14/2012	11:19:40 AM	BCl3 MFC set to  0.000000
8/14/2012	11:19:40 AM	PH3 MFC set to  0.000000
8/14/2012	11:19:40 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:19:40 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:19:40 AM	Tube furnace set to 0
8/14/2012	11:19:41 AM	Run finished at 11:19 AM
8/14/2012	11:19:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	11:51:18 AM	Main Vac valve closed
8/14/2012	11:51:31 AM	Main Vac valve opened
8/14/2012	11:51:35 AM	Helium MFC set to  10.000000
8/14/2012	11:51:36 AM	Helium valve opened
8/14/2012	11:52:07 AM	Helium valve closed
8/14/2012	11:52:30 AM	Recipe started at 11:52 AM
8/14/2012	11:52:30 AM	Helium valve closed
8/14/2012	11:52:30 AM	H2 valve closed
8/14/2012	11:52:30 AM	BCl3 valve closed
8/14/2012	11:52:30 AM	PH3 valve closed
8/14/2012	11:52:30 AM	SiCl4 pre valve closed
8/14/2012	11:52:30 AM	SiCl4 post valve closed
8/14/2012	11:52:30 AM	Main Vac valve closed
8/14/2012	11:52:30 AM	Bypass valve closed
8/14/2012	11:52:30 AM	Bubbler valve closed
8/14/2012	11:52:30 AM	Helium MFC set to  0.000000
8/14/2012	11:52:30 AM	H2 MFC set to  0.000000
8/14/2012	11:52:30 AM	BCl3 MFC set to  0.000000
8/14/2012	11:52:30 AM	PH3 MFC set to  0.000000
8/14/2012	11:52:30 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:52:30 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:52:30 AM	Tube furnace set to 0
8/14/2012	11:52:33 AM	Helium valve closed
8/14/2012	11:52:33 AM	BCl3 valve closed
8/14/2012	11:52:33 AM	PH3 valve closed
8/14/2012	11:52:33 AM	SiCl4 pre valve closed
8/14/2012	11:52:33 AM	SiCl4 post valve closed
8/14/2012	11:52:33 AM	Main Vac valve closed
8/14/2012	11:52:33 AM	Bypass valve closed
8/14/2012	11:52:33 AM	Bubbler valve closed
8/14/2012	11:52:33 AM	H2 valve opened
8/14/2012	11:52:33 AM	Helium MFC set to  0.000000
8/14/2012	11:52:33 AM	H2 MFC set to  500.000000
8/14/2012	11:52:33 AM	BCl3 MFC set to  0.000000
8/14/2012	11:52:33 AM	PH3 MFC set to  0.000000
8/14/2012	11:52:33 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:52:33 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:52:33 AM	Tube furnace set to 50
8/14/2012	11:53:49 AM	Helium valve closed
8/14/2012	11:53:49 AM	BCl3 valve closed
8/14/2012	11:53:49 AM	PH3 valve closed
8/14/2012	11:53:49 AM	SiCl4 pre valve closed
8/14/2012	11:53:49 AM	SiCl4 post valve closed
8/14/2012	11:53:49 AM	Main Vac valve closed
8/14/2012	11:53:49 AM	Bypass valve closed
8/14/2012	11:53:49 AM	H2 valve opened
8/14/2012	11:53:50 AM	Bubbler valve opened
8/14/2012	11:53:50 AM	Helium MFC set to  0.000000
8/14/2012	11:53:50 AM	H2 MFC set to  500.000000
8/14/2012	11:53:50 AM	BCl3 MFC set to  0.000000
8/14/2012	11:53:50 AM	PH3 MFC set to  0.000000
8/14/2012	11:53:50 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:53:50 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:53:50 AM	Tube furnace set to 50
8/14/2012	11:53:51 AM	Helium valve closed
8/14/2012	11:53:51 AM	BCl3 valve closed
8/14/2012	11:53:51 AM	PH3 valve closed
8/14/2012	11:53:51 AM	SiCl4 pre valve closed
8/14/2012	11:53:51 AM	SiCl4 post valve closed
8/14/2012	11:53:51 AM	Main Vac valve closed
8/14/2012	11:53:51 AM	Bypass valve closed
8/14/2012	11:53:51 AM	H2 valve opened
8/14/2012	11:53:51 AM	Bubbler valve opened
8/14/2012	11:53:51 AM	Helium MFC set to  0.000000
8/14/2012	11:53:51 AM	H2 MFC set to  500.000000
8/14/2012	11:53:51 AM	BCl3 MFC set to  0.000000
8/14/2012	11:53:51 AM	PH3 MFC set to  0.000000
8/14/2012	11:53:51 AM	SiCl4 MFC set to  0.000000
8/14/2012	11:53:51 AM	Bypass solenoid MFC set to  0.000000
8/14/2012	11:53:51 AM	Tube furnace set to 1000
8/14/2012	12:13:51 PM	Helium valve closed
8/14/2012	12:13:51 PM	BCl3 valve closed
8/14/2012	12:13:51 PM	PH3 valve closed
8/14/2012	12:13:51 PM	Main Vac valve closed
8/14/2012	12:13:51 PM	Bypass valve closed
8/14/2012	12:13:51 PM	H2 valve opened
8/14/2012	12:13:51 PM	SiCl4 pre valve opened
8/14/2012	12:13:51 PM	SiCl4 post valve opened
8/14/2012	12:13:51 PM	Bubbler valve opened
8/14/2012	12:13:51 PM	Helium MFC set to  0.000000
8/14/2012	12:13:51 PM	H2 MFC set to  500.000000
8/14/2012	12:13:51 PM	BCl3 MFC set to  0.000000
8/14/2012	12:13:51 PM	PH3 MFC set to  0.000000
8/14/2012	12:13:51 PM	SiCl4 MFC set to  50.000000
8/14/2012	12:13:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:13:51 PM	Tube furnace set to 1000
8/14/2012	12:33:51 PM	Helium valve closed
8/14/2012	12:33:51 PM	BCl3 valve closed
8/14/2012	12:33:51 PM	PH3 valve closed
8/14/2012	12:33:51 PM	SiCl4 pre valve closed
8/14/2012	12:33:51 PM	SiCl4 post valve closed
8/14/2012	12:33:51 PM	Main Vac valve closed
8/14/2012	12:33:51 PM	Bypass valve closed
8/14/2012	12:33:51 PM	H2 valve opened
8/14/2012	12:33:51 PM	Bubbler valve opened
8/14/2012	12:33:51 PM	Helium MFC set to  0.000000
8/14/2012	12:33:51 PM	H2 MFC set to  500.000000
8/14/2012	12:33:51 PM	BCl3 MFC set to  0.000000
8/14/2012	12:33:51 PM	PH3 MFC set to  0.000000
8/14/2012	12:33:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:33:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:33:51 PM	Tube furnace set to 950
8/14/2012	12:36:51 PM	Helium valve closed
8/14/2012	12:36:51 PM	BCl3 valve closed
8/14/2012	12:36:51 PM	PH3 valve closed
8/14/2012	12:36:51 PM	SiCl4 pre valve closed
8/14/2012	12:36:51 PM	SiCl4 post valve closed
8/14/2012	12:36:51 PM	Main Vac valve closed
8/14/2012	12:36:51 PM	Bypass valve closed
8/14/2012	12:36:51 PM	H2 valve opened
8/14/2012	12:36:51 PM	Bubbler valve opened
8/14/2012	12:36:51 PM	Helium MFC set to  0.000000
8/14/2012	12:36:51 PM	H2 MFC set to  500.000000
8/14/2012	12:36:51 PM	BCl3 MFC set to  0.000000
8/14/2012	12:36:51 PM	PH3 MFC set to  0.000000
8/14/2012	12:36:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:36:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:36:52 PM	Tube furnace set to 900
8/14/2012	12:39:52 PM	Helium valve closed
8/14/2012	12:39:52 PM	BCl3 valve closed
8/14/2012	12:39:52 PM	PH3 valve closed
8/14/2012	12:39:52 PM	SiCl4 pre valve closed
8/14/2012	12:39:52 PM	SiCl4 post valve closed
8/14/2012	12:39:52 PM	Main Vac valve closed
8/14/2012	12:39:52 PM	Bypass valve closed
8/14/2012	12:39:52 PM	H2 valve opened
8/14/2012	12:39:52 PM	Bubbler valve opened
8/14/2012	12:39:52 PM	Helium MFC set to  0.000000
8/14/2012	12:39:52 PM	H2 MFC set to  500.000000
8/14/2012	12:39:52 PM	BCl3 MFC set to  0.000000
8/14/2012	12:39:52 PM	PH3 MFC set to  0.000000
8/14/2012	12:39:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:39:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:39:52 PM	Tube furnace set to 850
8/14/2012	12:42:52 PM	Helium valve closed
8/14/2012	12:42:52 PM	BCl3 valve closed
8/14/2012	12:42:52 PM	PH3 valve closed
8/14/2012	12:42:52 PM	SiCl4 pre valve closed
8/14/2012	12:42:52 PM	SiCl4 post valve closed
8/14/2012	12:42:52 PM	Main Vac valve closed
8/14/2012	12:42:52 PM	Bypass valve closed
8/14/2012	12:42:52 PM	H2 valve opened
8/14/2012	12:42:52 PM	Bubbler valve opened
8/14/2012	12:42:52 PM	Helium MFC set to  0.000000
8/14/2012	12:42:52 PM	H2 MFC set to  500.000000
8/14/2012	12:42:52 PM	BCl3 MFC set to  0.000000
8/14/2012	12:42:52 PM	PH3 MFC set to  0.000000
8/14/2012	12:42:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:42:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:42:52 PM	Tube furnace set to 800
8/14/2012	12:45:52 PM	Helium valve closed
8/14/2012	12:45:52 PM	BCl3 valve closed
8/14/2012	12:45:52 PM	PH3 valve closed
8/14/2012	12:45:52 PM	SiCl4 pre valve closed
8/14/2012	12:45:52 PM	SiCl4 post valve closed
8/14/2012	12:45:52 PM	Main Vac valve closed
8/14/2012	12:45:52 PM	Bypass valve closed
8/14/2012	12:45:52 PM	H2 valve opened
8/14/2012	12:45:52 PM	Bubbler valve opened
8/14/2012	12:45:52 PM	Helium MFC set to  0.000000
8/14/2012	12:45:52 PM	H2 MFC set to  500.000000
8/14/2012	12:45:52 PM	BCl3 MFC set to  0.000000
8/14/2012	12:45:52 PM	PH3 MFC set to  0.000000
8/14/2012	12:45:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:45:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:45:52 PM	Tube furnace set to 750
8/14/2012	12:48:52 PM	H2 valve closed
8/14/2012	12:48:52 PM	BCl3 valve closed
8/14/2012	12:48:52 PM	PH3 valve closed
8/14/2012	12:48:52 PM	SiCl4 pre valve closed
8/14/2012	12:48:52 PM	SiCl4 post valve closed
8/14/2012	12:48:52 PM	Main Vac valve closed
8/14/2012	12:48:52 PM	Bypass valve closed
8/14/2012	12:48:52 PM	Helium valve opened
8/14/2012	12:48:52 PM	Bubbler valve opened
8/14/2012	12:48:52 PM	Helium MFC set to  400.000000
8/14/2012	12:48:52 PM	H2 MFC set to  0.000000
8/14/2012	12:48:52 PM	BCl3 MFC set to  0.000000
8/14/2012	12:48:52 PM	PH3 MFC set to  0.000000
8/14/2012	12:48:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	12:48:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	12:48:52 PM	Tube furnace set to 0
8/14/2012	1:13:52 PM	Helium valve closed
8/14/2012	1:13:52 PM	H2 valve closed
8/14/2012	1:13:52 PM	BCl3 valve closed
8/14/2012	1:13:52 PM	PH3 valve closed
8/14/2012	1:13:52 PM	SiCl4 pre valve closed
8/14/2012	1:13:52 PM	SiCl4 post valve closed
8/14/2012	1:13:52 PM	Main Vac valve closed
8/14/2012	1:13:52 PM	Bypass valve closed
8/14/2012	1:13:52 PM	Bubbler valve closed
8/14/2012	1:13:52 PM	Helium MFC set to  0.000000
8/14/2012	1:13:52 PM	H2 MFC set to  0.000000
8/14/2012	1:13:52 PM	BCl3 MFC set to  0.000000
8/14/2012	1:13:52 PM	PH3 MFC set to  0.000000
8/14/2012	1:13:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:13:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:13:53 PM	Tube furnace set to 50
8/14/2012	1:18:53 PM	Helium valve closed
8/14/2012	1:18:53 PM	H2 valve closed
8/14/2012	1:18:53 PM	BCl3 valve closed
8/14/2012	1:18:53 PM	PH3 valve closed
8/14/2012	1:18:53 PM	SiCl4 pre valve closed
8/14/2012	1:18:53 PM	SiCl4 post valve closed
8/14/2012	1:18:53 PM	Main Vac valve closed
8/14/2012	1:18:53 PM	Bubbler valve closed
8/14/2012	1:18:53 PM	Bypass valve opened
8/14/2012	1:18:53 PM	Helium MFC set to  0.000000
8/14/2012	1:18:53 PM	H2 MFC set to  0.000000
8/14/2012	1:18:53 PM	BCl3 MFC set to  0.000000
8/14/2012	1:18:53 PM	PH3 MFC set to  0.000000
8/14/2012	1:18:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:18:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:18:53 PM	Tube furnace set to 0
8/14/2012	1:19:53 PM	Helium valve closed
8/14/2012	1:19:53 PM	H2 valve closed
8/14/2012	1:19:53 PM	BCl3 valve closed
8/14/2012	1:19:53 PM	PH3 valve closed
8/14/2012	1:19:53 PM	SiCl4 pre valve closed
8/14/2012	1:19:53 PM	SiCl4 post valve closed
8/14/2012	1:19:53 PM	Bypass valve closed
8/14/2012	1:19:53 PM	Bubbler valve closed
8/14/2012	1:19:53 PM	Main Vac valve opened
8/14/2012	1:19:53 PM	Helium MFC set to  0.000000
8/14/2012	1:19:53 PM	H2 MFC set to  0.000000
8/14/2012	1:19:53 PM	BCl3 MFC set to  0.000000
8/14/2012	1:19:53 PM	PH3 MFC set to  0.000000
8/14/2012	1:19:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:19:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:19:53 PM	Tube furnace set to 0
8/14/2012	1:19:54 PM	Run finished at 1:19 PM
8/14/2012	1:47:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	1:47:51 PM	Recipe started at 1:47 PM
8/14/2012	1:47:51 PM	Helium valve closed
8/14/2012	1:47:51 PM	H2 valve closed
8/14/2012	1:47:51 PM	BCl3 valve closed
8/14/2012	1:47:51 PM	PH3 valve closed
8/14/2012	1:47:51 PM	SiCl4 pre valve closed
8/14/2012	1:47:51 PM	SiCl4 post valve closed
8/14/2012	1:47:51 PM	Main Vac valve closed
8/14/2012	1:47:51 PM	Bypass valve closed
8/14/2012	1:47:51 PM	Bubbler valve closed
8/14/2012	1:47:51 PM	Helium MFC set to  0.000000
8/14/2012	1:47:51 PM	H2 MFC set to  0.000000
8/14/2012	1:47:51 PM	BCl3 MFC set to  0.000000
8/14/2012	1:47:51 PM	PH3 MFC set to  0.000000
8/14/2012	1:47:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:47:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:47:51 PM	Tube furnace set to 0
8/14/2012	1:47:54 PM	H2 valve closed
8/14/2012	1:47:54 PM	BCl3 valve closed
8/14/2012	1:47:54 PM	PH3 valve closed
8/14/2012	1:47:54 PM	SiCl4 pre valve closed
8/14/2012	1:47:54 PM	SiCl4 post valve closed
8/14/2012	1:47:54 PM	Main Vac valve closed
8/14/2012	1:47:54 PM	Bypass valve closed
8/14/2012	1:47:54 PM	Bubbler valve closed
8/14/2012	1:47:54 PM	Helium valve opened
8/14/2012	1:47:54 PM	Helium MFC set to  500.000000
8/14/2012	1:47:54 PM	H2 MFC set to  0.000000
8/14/2012	1:47:54 PM	BCl3 MFC set to  0.000000
8/14/2012	1:47:54 PM	PH3 MFC set to  0.000000
8/14/2012	1:47:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:47:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:47:54 PM	Tube furnace set to 0
8/14/2012	1:49:00 PM	Helium valve closed
8/14/2012	1:49:00 PM	H2 valve closed
8/14/2012	1:49:00 PM	BCl3 valve closed
8/14/2012	1:49:00 PM	PH3 valve closed
8/14/2012	1:49:00 PM	SiCl4 pre valve closed
8/14/2012	1:49:00 PM	SiCl4 post valve closed
8/14/2012	1:49:00 PM	Main Vac valve closed
8/14/2012	1:49:00 PM	Bypass valve closed
8/14/2012	1:49:00 PM	Bubbler valve closed
8/14/2012	1:49:00 PM	Helium MFC set to  0.000000
8/14/2012	1:49:00 PM	H2 MFC set to  0.000000
8/14/2012	1:49:00 PM	BCl3 MFC set to  0.000000
8/14/2012	1:49:00 PM	PH3 MFC set to  0.000000
8/14/2012	1:49:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	1:49:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	1:49:00 PM	Tube furnace set to 0
8/14/2012	1:49:01 PM	Run finished at 1:49 PM
8/14/2012	1:49:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	3:04:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	3:04:57 PM	Recipe started at 3:04 PM
8/14/2012	3:04:57 PM	Helium valve closed
8/14/2012	3:04:57 PM	H2 valve closed
8/14/2012	3:04:57 PM	BCl3 valve closed
8/14/2012	3:04:57 PM	PH3 valve closed
8/14/2012	3:04:57 PM	SiCl4 pre valve closed
8/14/2012	3:04:57 PM	SiCl4 post valve closed
8/14/2012	3:04:57 PM	Main Vac valve closed
8/14/2012	3:04:57 PM	Bypass valve closed
8/14/2012	3:04:57 PM	Bubbler valve closed
8/14/2012	3:04:57 PM	Helium MFC set to  0.000000
8/14/2012	3:04:57 PM	H2 MFC set to  0.000000
8/14/2012	3:04:57 PM	BCl3 MFC set to  0.000000
8/14/2012	3:04:57 PM	PH3 MFC set to  0.000000
8/14/2012	3:04:57 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:04:57 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:04:57 PM	Tube furnace set to 0
8/14/2012	3:05:00 PM	H2 valve closed
8/14/2012	3:05:00 PM	BCl3 valve closed
8/14/2012	3:05:00 PM	PH3 valve closed
8/14/2012	3:05:00 PM	SiCl4 pre valve closed
8/14/2012	3:05:00 PM	SiCl4 post valve closed
8/14/2012	3:05:00 PM	Main Vac valve closed
8/14/2012	3:05:00 PM	Bypass valve closed
8/14/2012	3:05:00 PM	Bubbler valve closed
8/14/2012	3:05:00 PM	Helium valve opened
8/14/2012	3:05:00 PM	Helium MFC set to  500.000000
8/14/2012	3:05:00 PM	H2 MFC set to  0.000000
8/14/2012	3:05:00 PM	BCl3 MFC set to  0.000000
8/14/2012	3:05:00 PM	PH3 MFC set to  0.000000
8/14/2012	3:05:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:05:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:05:00 PM	Tube furnace set to 0
8/14/2012	3:05:04 PM	Helium valve closed
8/14/2012	3:05:04 PM	H2 valve closed
8/14/2012	3:05:04 PM	BCl3 valve closed
8/14/2012	3:05:04 PM	PH3 valve closed
8/14/2012	3:05:04 PM	SiCl4 pre valve closed
8/14/2012	3:05:04 PM	SiCl4 post valve closed
8/14/2012	3:05:04 PM	Main Vac valve closed
8/14/2012	3:05:04 PM	Bypass valve closed
8/14/2012	3:05:04 PM	Bubbler valve closed
8/14/2012	3:05:04 PM	Helium MFC set to  0.000000
8/14/2012	3:05:04 PM	H2 MFC set to  0.000000
8/14/2012	3:05:04 PM	BCl3 MFC set to  0.000000
8/14/2012	3:05:04 PM	PH3 MFC set to  0.000000
8/14/2012	3:05:04 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:05:04 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:05:04 PM	Tube furnace set to 0
8/14/2012	3:05:05 PM	Run finished at 3:05 PM
8/14/2012	3:05:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	3:09:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2012	3:09:57 PM	Recipe started at 3:09 PM
8/14/2012	3:09:57 PM	Helium valve closed
8/14/2012	3:09:57 PM	H2 valve closed
8/14/2012	3:09:57 PM	BCl3 valve closed
8/14/2012	3:09:57 PM	PH3 valve closed
8/14/2012	3:09:57 PM	SiCl4 pre valve closed
8/14/2012	3:09:57 PM	SiCl4 post valve closed
8/14/2012	3:09:57 PM	Main Vac valve closed
8/14/2012	3:09:57 PM	Bubbler valve closed
8/14/2012	3:09:57 PM	Bypass valve opened
8/14/2012	3:09:57 PM	Helium MFC set to  0.000000
8/14/2012	3:09:57 PM	H2 MFC set to  0.000000
8/14/2012	3:09:57 PM	BCl3 MFC set to  0.000000
8/14/2012	3:09:57 PM	PH3 MFC set to  0.000000
8/14/2012	3:09:57 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:09:57 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:09:57 PM	Tube furnace set to 0
8/14/2012	3:11:25 PM	Helium valve closed
8/14/2012	3:11:25 PM	H2 valve closed
8/14/2012	3:11:25 PM	BCl3 valve closed
8/14/2012	3:11:25 PM	PH3 valve closed
8/14/2012	3:11:25 PM	SiCl4 pre valve closed
8/14/2012	3:11:25 PM	SiCl4 post valve closed
8/14/2012	3:11:25 PM	Main Vac valve closed
8/14/2012	3:11:25 PM	Bubbler valve closed
8/14/2012	3:11:25 PM	Bypass valve opened
8/14/2012	3:11:25 PM	Helium MFC set to  0.000000
8/14/2012	3:11:25 PM	H2 MFC set to  0.000000
8/14/2012	3:11:25 PM	BCl3 MFC set to  0.000000
8/14/2012	3:11:25 PM	PH3 MFC set to  0.000000
8/14/2012	3:11:25 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:11:25 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:11:26 PM	Tube furnace set to 0
8/14/2012	3:12:26 PM	Helium valve closed
8/14/2012	3:12:26 PM	H2 valve closed
8/14/2012	3:12:26 PM	BCl3 valve closed
8/14/2012	3:12:26 PM	PH3 valve closed
8/14/2012	3:12:26 PM	SiCl4 pre valve closed
8/14/2012	3:12:26 PM	SiCl4 post valve closed
8/14/2012	3:12:26 PM	Bypass valve closed
8/14/2012	3:12:26 PM	Bubbler valve closed
8/14/2012	3:12:26 PM	Main Vac valve opened
8/14/2012	3:12:26 PM	Helium MFC set to  0.000000
8/14/2012	3:12:26 PM	H2 MFC set to  0.000000
8/14/2012	3:12:26 PM	BCl3 MFC set to  0.000000
8/14/2012	3:12:26 PM	PH3 MFC set to  0.000000
8/14/2012	3:12:26 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:12:26 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:12:26 PM	Tube furnace set to 0
8/14/2012	3:12:27 PM	Run finished at 3:12 PM
8/14/2012	3:12:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2012	3:45:19 PM	Main Vac valve closed
8/14/2012	3:45:33 PM	Main Vac valve opened
8/14/2012	3:45:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	3:45:46 PM	Recipe started at 3:45 PM
8/14/2012	3:45:46 PM	Helium valve closed
8/14/2012	3:45:46 PM	H2 valve closed
8/14/2012	3:45:46 PM	BCl3 valve closed
8/14/2012	3:45:46 PM	PH3 valve closed
8/14/2012	3:45:46 PM	SiCl4 pre valve closed
8/14/2012	3:45:46 PM	SiCl4 post valve closed
8/14/2012	3:45:46 PM	Main Vac valve closed
8/14/2012	3:45:46 PM	Bubbler valve closed
8/14/2012	3:45:46 PM	Bypass valve opened
8/14/2012	3:45:46 PM	Helium MFC set to  0.000000
8/14/2012	3:45:46 PM	H2 MFC set to  0.000000
8/14/2012	3:45:46 PM	BCl3 MFC set to  0.000000
8/14/2012	3:45:46 PM	PH3 MFC set to  0.000000
8/14/2012	3:45:46 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:45:46 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:45:46 PM	Tube furnace set to 0
8/14/2012	3:45:47 PM	Helium valve closed
8/14/2012	3:45:47 PM	H2 valve closed
8/14/2012	3:45:47 PM	BCl3 valve closed
8/14/2012	3:45:47 PM	PH3 valve closed
8/14/2012	3:45:47 PM	SiCl4 pre valve closed
8/14/2012	3:45:47 PM	SiCl4 post valve closed
8/14/2012	3:45:47 PM	Main Vac valve closed
8/14/2012	3:45:47 PM	Bubbler valve closed
8/14/2012	3:45:47 PM	Bypass valve opened
8/14/2012	3:45:47 PM	Helium MFC set to  0.000000
8/14/2012	3:45:47 PM	H2 MFC set to  0.000000
8/14/2012	3:45:47 PM	BCl3 MFC set to  0.000000
8/14/2012	3:45:47 PM	PH3 MFC set to  0.000000
8/14/2012	3:45:47 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:45:47 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:45:47 PM	Tube furnace set to 0
8/14/2012	3:45:49 PM	Helium valve closed
8/14/2012	3:45:49 PM	H2 valve closed
8/14/2012	3:45:49 PM	BCl3 valve closed
8/14/2012	3:45:49 PM	PH3 valve closed
8/14/2012	3:45:49 PM	SiCl4 pre valve closed
8/14/2012	3:45:49 PM	SiCl4 post valve closed
8/14/2012	3:45:49 PM	Bypass valve closed
8/14/2012	3:45:49 PM	Bubbler valve closed
8/14/2012	3:45:49 PM	Main Vac valve opened
8/14/2012	3:45:49 PM	Helium MFC set to  0.000000
8/14/2012	3:45:49 PM	H2 MFC set to  0.000000
8/14/2012	3:45:49 PM	BCl3 MFC set to  0.000000
8/14/2012	3:45:49 PM	PH3 MFC set to  0.000000
8/14/2012	3:45:49 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:45:49 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:45:49 PM	Tube furnace set to 0
8/14/2012	3:45:58 PM	H2 valve closed
8/14/2012	3:45:58 PM	BCl3 valve closed
8/14/2012	3:45:58 PM	PH3 valve closed
8/14/2012	3:45:58 PM	SiCl4 pre valve closed
8/14/2012	3:45:58 PM	SiCl4 post valve closed
8/14/2012	3:45:58 PM	Bypass valve closed
8/14/2012	3:45:58 PM	Bubbler valve closed
8/14/2012	3:45:58 PM	Helium valve opened
8/14/2012	3:45:58 PM	Main Vac valve opened
8/14/2012	3:45:58 PM	Helium MFC set to  20.000000
8/14/2012	3:45:58 PM	H2 MFC set to  0.000000
8/14/2012	3:45:58 PM	BCl3 MFC set to  0.000000
8/14/2012	3:45:58 PM	PH3 MFC set to  0.000000
8/14/2012	3:45:58 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:45:58 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:45:58 PM	Tube furnace set to 0
8/14/2012	3:46:28 PM	Helium valve closed
8/14/2012	3:46:28 PM	H2 valve closed
8/14/2012	3:46:28 PM	BCl3 valve closed
8/14/2012	3:46:28 PM	PH3 valve closed
8/14/2012	3:46:28 PM	SiCl4 pre valve closed
8/14/2012	3:46:28 PM	SiCl4 post valve closed
8/14/2012	3:46:28 PM	Bypass valve closed
8/14/2012	3:46:28 PM	Bubbler valve closed
8/14/2012	3:46:28 PM	Main Vac valve opened
8/14/2012	3:46:28 PM	Helium MFC set to  0.000000
8/14/2012	3:46:28 PM	H2 MFC set to  0.000000
8/14/2012	3:46:28 PM	BCl3 MFC set to  0.000000
8/14/2012	3:46:28 PM	PH3 MFC set to  0.000000
8/14/2012	3:46:28 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:46:28 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:46:28 PM	Tube furnace set to 0
8/14/2012	3:46:58 PM	H2 valve closed
8/14/2012	3:46:58 PM	BCl3 valve closed
8/14/2012	3:46:58 PM	PH3 valve closed
8/14/2012	3:46:58 PM	SiCl4 pre valve closed
8/14/2012	3:46:58 PM	SiCl4 post valve closed
8/14/2012	3:46:58 PM	Bypass valve closed
8/14/2012	3:46:58 PM	Bubbler valve closed
8/14/2012	3:46:58 PM	Helium valve opened
8/14/2012	3:46:58 PM	Main Vac valve opened
8/14/2012	3:46:58 PM	Helium MFC set to  20.000000
8/14/2012	3:46:58 PM	H2 MFC set to  0.000000
8/14/2012	3:46:58 PM	BCl3 MFC set to  0.000000
8/14/2012	3:46:58 PM	PH3 MFC set to  0.000000
8/14/2012	3:46:58 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:46:58 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:46:58 PM	Tube furnace set to 0
8/14/2012	3:47:28 PM	Helium valve closed
8/14/2012	3:47:28 PM	H2 valve closed
8/14/2012	3:47:28 PM	BCl3 valve closed
8/14/2012	3:47:28 PM	PH3 valve closed
8/14/2012	3:47:28 PM	SiCl4 pre valve closed
8/14/2012	3:47:28 PM	SiCl4 post valve closed
8/14/2012	3:47:28 PM	Bypass valve closed
8/14/2012	3:47:28 PM	Bubbler valve closed
8/14/2012	3:47:28 PM	Main Vac valve opened
8/14/2012	3:47:28 PM	Helium MFC set to  0.000000
8/14/2012	3:47:28 PM	H2 MFC set to  0.000000
8/14/2012	3:47:28 PM	BCl3 MFC set to  0.000000
8/14/2012	3:47:28 PM	PH3 MFC set to  0.000000
8/14/2012	3:47:28 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:47:28 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:47:28 PM	Tube furnace set to 0
8/14/2012	3:47:59 PM	H2 valve closed
8/14/2012	3:47:59 PM	BCl3 valve closed
8/14/2012	3:47:59 PM	PH3 valve closed
8/14/2012	3:47:59 PM	SiCl4 pre valve closed
8/14/2012	3:47:59 PM	SiCl4 post valve closed
8/14/2012	3:47:59 PM	Bypass valve closed
8/14/2012	3:47:59 PM	Bubbler valve closed
8/14/2012	3:47:59 PM	Helium valve opened
8/14/2012	3:47:59 PM	Main Vac valve opened
8/14/2012	3:47:59 PM	Helium MFC set to  20.000000
8/14/2012	3:47:59 PM	H2 MFC set to  0.000000
8/14/2012	3:47:59 PM	BCl3 MFC set to  0.000000
8/14/2012	3:47:59 PM	PH3 MFC set to  0.000000
8/14/2012	3:47:59 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:47:59 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:47:59 PM	Tube furnace set to 0
8/14/2012	3:48:29 PM	Helium valve closed
8/14/2012	3:48:29 PM	H2 valve closed
8/14/2012	3:48:29 PM	BCl3 valve closed
8/14/2012	3:48:29 PM	PH3 valve closed
8/14/2012	3:48:29 PM	SiCl4 pre valve closed
8/14/2012	3:48:29 PM	SiCl4 post valve closed
8/14/2012	3:48:29 PM	Bypass valve closed
8/14/2012	3:48:29 PM	Bubbler valve closed
8/14/2012	3:48:29 PM	Main Vac valve opened
8/14/2012	3:48:29 PM	Helium MFC set to  0.000000
8/14/2012	3:48:29 PM	H2 MFC set to  0.000000
8/14/2012	3:48:29 PM	BCl3 MFC set to  0.000000
8/14/2012	3:48:29 PM	PH3 MFC set to  0.000000
8/14/2012	3:48:29 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:48:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:48:29 PM	Tube furnace set to 0
8/14/2012	3:48:59 PM	H2 valve closed
8/14/2012	3:48:59 PM	BCl3 valve closed
8/14/2012	3:48:59 PM	PH3 valve closed
8/14/2012	3:48:59 PM	SiCl4 pre valve closed
8/14/2012	3:48:59 PM	SiCl4 post valve closed
8/14/2012	3:48:59 PM	Bypass valve closed
8/14/2012	3:48:59 PM	Bubbler valve closed
8/14/2012	3:48:59 PM	Helium valve opened
8/14/2012	3:48:59 PM	Main Vac valve opened
8/14/2012	3:48:59 PM	Helium MFC set to  20.000000
8/14/2012	3:48:59 PM	H2 MFC set to  0.000000
8/14/2012	3:48:59 PM	BCl3 MFC set to  0.000000
8/14/2012	3:48:59 PM	PH3 MFC set to  0.000000
8/14/2012	3:48:59 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:48:59 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:48:59 PM	Tube furnace set to 0
8/14/2012	3:49:29 PM	Helium valve closed
8/14/2012	3:49:29 PM	H2 valve closed
8/14/2012	3:49:29 PM	BCl3 valve closed
8/14/2012	3:49:29 PM	PH3 valve closed
8/14/2012	3:49:29 PM	SiCl4 pre valve closed
8/14/2012	3:49:29 PM	SiCl4 post valve closed
8/14/2012	3:49:29 PM	Bypass valve closed
8/14/2012	3:49:29 PM	Bubbler valve closed
8/14/2012	3:49:29 PM	Main Vac valve opened
8/14/2012	3:49:29 PM	Helium MFC set to  0.000000
8/14/2012	3:49:29 PM	H2 MFC set to  0.000000
8/14/2012	3:49:29 PM	BCl3 MFC set to  0.000000
8/14/2012	3:49:29 PM	PH3 MFC set to  0.000000
8/14/2012	3:49:29 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:49:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:49:29 PM	Tube furnace set to 0
8/14/2012	3:49:59 PM	H2 valve closed
8/14/2012	3:49:59 PM	BCl3 valve closed
8/14/2012	3:49:59 PM	PH3 valve closed
8/14/2012	3:49:59 PM	SiCl4 pre valve closed
8/14/2012	3:49:59 PM	SiCl4 post valve closed
8/14/2012	3:49:59 PM	Bypass valve closed
8/14/2012	3:49:59 PM	Bubbler valve closed
8/14/2012	3:50:00 PM	Helium valve opened
8/14/2012	3:50:00 PM	Main Vac valve opened
8/14/2012	3:50:00 PM	Helium MFC set to  20.000000
8/14/2012	3:50:00 PM	H2 MFC set to  0.000000
8/14/2012	3:50:00 PM	BCl3 MFC set to  0.000000
8/14/2012	3:50:00 PM	PH3 MFC set to  0.000000
8/14/2012	3:50:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:50:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:50:00 PM	Tube furnace set to 0
8/14/2012	3:50:30 PM	Helium valve closed
8/14/2012	3:50:30 PM	H2 valve closed
8/14/2012	3:50:30 PM	BCl3 valve closed
8/14/2012	3:50:30 PM	PH3 valve closed
8/14/2012	3:50:30 PM	SiCl4 pre valve closed
8/14/2012	3:50:30 PM	SiCl4 post valve closed
8/14/2012	3:50:30 PM	Bypass valve closed
8/14/2012	3:50:30 PM	Bubbler valve closed
8/14/2012	3:50:30 PM	Main Vac valve opened
8/14/2012	3:50:30 PM	Helium MFC set to  0.000000
8/14/2012	3:50:30 PM	H2 MFC set to  0.000000
8/14/2012	3:50:30 PM	BCl3 MFC set to  0.000000
8/14/2012	3:50:30 PM	PH3 MFC set to  0.000000
8/14/2012	3:50:30 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:50:30 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:50:30 PM	Tube furnace set to 0
8/14/2012	3:51:00 PM	H2 valve closed
8/14/2012	3:51:00 PM	BCl3 valve closed
8/14/2012	3:51:00 PM	PH3 valve closed
8/14/2012	3:51:00 PM	SiCl4 pre valve closed
8/14/2012	3:51:00 PM	SiCl4 post valve closed
8/14/2012	3:51:00 PM	Bypass valve closed
8/14/2012	3:51:00 PM	Bubbler valve closed
8/14/2012	3:51:00 PM	Helium valve opened
8/14/2012	3:51:00 PM	Main Vac valve opened
8/14/2012	3:51:00 PM	Helium MFC set to  20.000000
8/14/2012	3:51:00 PM	H2 MFC set to  0.000000
8/14/2012	3:51:00 PM	BCl3 MFC set to  0.000000
8/14/2012	3:51:00 PM	PH3 MFC set to  0.000000
8/14/2012	3:51:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:51:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:51:00 PM	Tube furnace set to 0
8/14/2012	3:51:30 PM	Helium valve closed
8/14/2012	3:51:30 PM	H2 valve closed
8/14/2012	3:51:30 PM	BCl3 valve closed
8/14/2012	3:51:30 PM	PH3 valve closed
8/14/2012	3:51:30 PM	SiCl4 pre valve closed
8/14/2012	3:51:30 PM	SiCl4 post valve closed
8/14/2012	3:51:30 PM	Bypass valve closed
8/14/2012	3:51:30 PM	Bubbler valve closed
8/14/2012	3:51:30 PM	Main Vac valve opened
8/14/2012	3:51:30 PM	Helium MFC set to  0.000000
8/14/2012	3:51:30 PM	H2 MFC set to  0.000000
8/14/2012	3:51:30 PM	BCl3 MFC set to  0.000000
8/14/2012	3:51:30 PM	PH3 MFC set to  0.000000
8/14/2012	3:51:30 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:51:30 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:51:30 PM	Tube furnace set to 0
8/14/2012	3:52:00 PM	H2 valve closed
8/14/2012	3:52:00 PM	BCl3 valve closed
8/14/2012	3:52:00 PM	PH3 valve closed
8/14/2012	3:52:00 PM	SiCl4 pre valve closed
8/14/2012	3:52:00 PM	SiCl4 post valve closed
8/14/2012	3:52:00 PM	Bypass valve closed
8/14/2012	3:52:00 PM	Bubbler valve closed
8/14/2012	3:52:00 PM	Helium valve opened
8/14/2012	3:52:00 PM	Main Vac valve opened
8/14/2012	3:52:00 PM	Helium MFC set to  20.000000
8/14/2012	3:52:00 PM	H2 MFC set to  0.000000
8/14/2012	3:52:00 PM	BCl3 MFC set to  0.000000
8/14/2012	3:52:00 PM	PH3 MFC set to  0.000000
8/14/2012	3:52:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:52:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:52:01 PM	Tube furnace set to 0
8/14/2012	3:52:31 PM	Helium valve closed
8/14/2012	3:52:31 PM	H2 valve closed
8/14/2012	3:52:31 PM	BCl3 valve closed
8/14/2012	3:52:31 PM	PH3 valve closed
8/14/2012	3:52:31 PM	SiCl4 pre valve closed
8/14/2012	3:52:31 PM	SiCl4 post valve closed
8/14/2012	3:52:31 PM	Bypass valve closed
8/14/2012	3:52:31 PM	Bubbler valve closed
8/14/2012	3:52:31 PM	Main Vac valve opened
8/14/2012	3:52:31 PM	Helium MFC set to  0.000000
8/14/2012	3:52:31 PM	H2 MFC set to  0.000000
8/14/2012	3:52:31 PM	BCl3 MFC set to  0.000000
8/14/2012	3:52:31 PM	PH3 MFC set to  0.000000
8/14/2012	3:52:31 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:52:31 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:52:31 PM	Tube furnace set to 0
8/14/2012	3:53:01 PM	H2 valve closed
8/14/2012	3:53:01 PM	BCl3 valve closed
8/14/2012	3:53:01 PM	PH3 valve closed
8/14/2012	3:53:01 PM	SiCl4 pre valve closed
8/14/2012	3:53:01 PM	SiCl4 post valve closed
8/14/2012	3:53:01 PM	Bypass valve closed
8/14/2012	3:53:01 PM	Bubbler valve closed
8/14/2012	3:53:01 PM	Helium valve opened
8/14/2012	3:53:01 PM	Main Vac valve opened
8/14/2012	3:53:01 PM	Helium MFC set to  20.000000
8/14/2012	3:53:01 PM	H2 MFC set to  0.000000
8/14/2012	3:53:01 PM	BCl3 MFC set to  0.000000
8/14/2012	3:53:01 PM	PH3 MFC set to  0.000000
8/14/2012	3:53:01 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:53:01 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:53:01 PM	Tube furnace set to 0
8/14/2012	3:53:31 PM	Helium valve closed
8/14/2012	3:53:31 PM	H2 valve closed
8/14/2012	3:53:31 PM	BCl3 valve closed
8/14/2012	3:53:31 PM	PH3 valve closed
8/14/2012	3:53:31 PM	SiCl4 pre valve closed
8/14/2012	3:53:31 PM	SiCl4 post valve closed
8/14/2012	3:53:31 PM	Bypass valve closed
8/14/2012	3:53:31 PM	Bubbler valve closed
8/14/2012	3:53:31 PM	Main Vac valve opened
8/14/2012	3:53:31 PM	Helium MFC set to  0.000000
8/14/2012	3:53:31 PM	H2 MFC set to  0.000000
8/14/2012	3:53:31 PM	BCl3 MFC set to  0.000000
8/14/2012	3:53:31 PM	PH3 MFC set to  0.000000
8/14/2012	3:53:31 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:53:31 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:53:31 PM	Tube furnace set to 0
8/14/2012	3:54:01 PM	H2 valve closed
8/14/2012	3:54:01 PM	BCl3 valve closed
8/14/2012	3:54:01 PM	PH3 valve closed
8/14/2012	3:54:01 PM	SiCl4 pre valve closed
8/14/2012	3:54:01 PM	SiCl4 post valve closed
8/14/2012	3:54:01 PM	Bypass valve closed
8/14/2012	3:54:01 PM	Bubbler valve closed
8/14/2012	3:54:01 PM	Helium valve opened
8/14/2012	3:54:01 PM	Main Vac valve opened
8/14/2012	3:54:01 PM	Helium MFC set to  20.000000
8/14/2012	3:54:01 PM	H2 MFC set to  0.000000
8/14/2012	3:54:01 PM	BCl3 MFC set to  0.000000
8/14/2012	3:54:01 PM	PH3 MFC set to  0.000000
8/14/2012	3:54:01 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:54:01 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:54:02 PM	Tube furnace set to 0
8/14/2012	3:54:32 PM	Helium valve closed
8/14/2012	3:54:32 PM	H2 valve closed
8/14/2012	3:54:32 PM	BCl3 valve closed
8/14/2012	3:54:32 PM	PH3 valve closed
8/14/2012	3:54:32 PM	SiCl4 pre valve closed
8/14/2012	3:54:32 PM	SiCl4 post valve closed
8/14/2012	3:54:32 PM	Bypass valve closed
8/14/2012	3:54:32 PM	Bubbler valve closed
8/14/2012	3:54:32 PM	Main Vac valve opened
8/14/2012	3:54:32 PM	Helium MFC set to  0.000000
8/14/2012	3:54:32 PM	H2 MFC set to  0.000000
8/14/2012	3:54:32 PM	BCl3 MFC set to  0.000000
8/14/2012	3:54:32 PM	PH3 MFC set to  0.000000
8/14/2012	3:54:32 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:54:32 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:54:32 PM	Tube furnace set to 0
8/14/2012	3:55:02 PM	H2 valve closed
8/14/2012	3:55:02 PM	BCl3 valve closed
8/14/2012	3:55:02 PM	PH3 valve closed
8/14/2012	3:55:02 PM	SiCl4 pre valve closed
8/14/2012	3:55:02 PM	SiCl4 post valve closed
8/14/2012	3:55:02 PM	Bypass valve closed
8/14/2012	3:55:02 PM	Bubbler valve closed
8/14/2012	3:55:02 PM	Helium valve opened
8/14/2012	3:55:02 PM	Main Vac valve opened
8/14/2012	3:55:02 PM	Helium MFC set to  20.000000
8/14/2012	3:55:02 PM	H2 MFC set to  0.000000
8/14/2012	3:55:02 PM	BCl3 MFC set to  0.000000
8/14/2012	3:55:02 PM	PH3 MFC set to  0.000000
8/14/2012	3:55:02 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:55:02 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:55:02 PM	Tube furnace set to 0
8/14/2012	3:55:32 PM	Helium valve closed
8/14/2012	3:55:32 PM	H2 valve closed
8/14/2012	3:55:32 PM	BCl3 valve closed
8/14/2012	3:55:32 PM	PH3 valve closed
8/14/2012	3:55:32 PM	SiCl4 pre valve closed
8/14/2012	3:55:32 PM	SiCl4 post valve closed
8/14/2012	3:55:32 PM	Bypass valve closed
8/14/2012	3:55:32 PM	Bubbler valve closed
8/14/2012	3:55:32 PM	Main Vac valve opened
8/14/2012	3:55:32 PM	Helium MFC set to  0.000000
8/14/2012	3:55:32 PM	H2 MFC set to  0.000000
8/14/2012	3:55:32 PM	BCl3 MFC set to  0.000000
8/14/2012	3:55:32 PM	PH3 MFC set to  0.000000
8/14/2012	3:55:32 PM	SiCl4 MFC set to  0.000000
8/14/2012	3:55:32 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	3:55:32 PM	Tube furnace set to 0
8/14/2012	3:55:33 PM	Run finished at 3:55 PM
8/14/2012	3:55:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	4:04:23 PM	Main Vac valve closed
8/14/2012	4:04:37 PM	Main Vac valve opened
8/14/2012	4:04:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	4:04:51 PM	Recipe started at 4:04 PM
8/14/2012	4:04:51 PM	Helium valve closed
8/14/2012	4:04:51 PM	H2 valve closed
8/14/2012	4:04:51 PM	BCl3 valve closed
8/14/2012	4:04:51 PM	PH3 valve closed
8/14/2012	4:04:51 PM	SiCl4 pre valve closed
8/14/2012	4:04:51 PM	SiCl4 post valve closed
8/14/2012	4:04:51 PM	Main Vac valve closed
8/14/2012	4:04:51 PM	Bubbler valve closed
8/14/2012	4:04:51 PM	Bypass valve opened
8/14/2012	4:04:51 PM	Helium MFC set to  0.000000
8/14/2012	4:04:51 PM	H2 MFC set to  0.000000
8/14/2012	4:04:51 PM	BCl3 MFC set to  0.000000
8/14/2012	4:04:51 PM	PH3 MFC set to  0.000000
8/14/2012	4:04:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:04:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:04:51 PM	Tube furnace set to 0
8/14/2012	4:04:51 PM	Helium valve closed
8/14/2012	4:04:51 PM	H2 valve closed
8/14/2012	4:04:51 PM	BCl3 valve closed
8/14/2012	4:04:51 PM	PH3 valve closed
8/14/2012	4:04:51 PM	SiCl4 pre valve closed
8/14/2012	4:04:51 PM	SiCl4 post valve closed
8/14/2012	4:04:51 PM	Main Vac valve closed
8/14/2012	4:04:51 PM	Bubbler valve closed
8/14/2012	4:04:51 PM	Bypass valve opened
8/14/2012	4:04:51 PM	Helium MFC set to  0.000000
8/14/2012	4:04:51 PM	H2 MFC set to  0.000000
8/14/2012	4:04:51 PM	BCl3 MFC set to  0.000000
8/14/2012	4:04:51 PM	PH3 MFC set to  0.000000
8/14/2012	4:04:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:04:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:04:51 PM	Tube furnace set to 0
8/14/2012	4:04:53 PM	Helium valve closed
8/14/2012	4:04:53 PM	H2 valve closed
8/14/2012	4:04:53 PM	BCl3 valve closed
8/14/2012	4:04:53 PM	PH3 valve closed
8/14/2012	4:04:53 PM	SiCl4 pre valve closed
8/14/2012	4:04:53 PM	SiCl4 post valve closed
8/14/2012	4:04:53 PM	Bypass valve closed
8/14/2012	4:04:53 PM	Bubbler valve closed
8/14/2012	4:04:53 PM	Main Vac valve opened
8/14/2012	4:04:53 PM	Helium MFC set to  0.000000
8/14/2012	4:04:53 PM	H2 MFC set to  0.000000
8/14/2012	4:04:53 PM	BCl3 MFC set to  0.000000
8/14/2012	4:04:53 PM	PH3 MFC set to  0.000000
8/14/2012	4:04:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:04:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:04:53 PM	Tube furnace set to 0
8/14/2012	4:04:56 PM	H2 valve closed
8/14/2012	4:04:56 PM	BCl3 valve closed
8/14/2012	4:04:56 PM	PH3 valve closed
8/14/2012	4:04:56 PM	SiCl4 pre valve closed
8/14/2012	4:04:56 PM	SiCl4 post valve closed
8/14/2012	4:04:56 PM	Bypass valve closed
8/14/2012	4:04:56 PM	Bubbler valve closed
8/14/2012	4:04:56 PM	Helium valve opened
8/14/2012	4:04:56 PM	Main Vac valve opened
8/14/2012	4:04:56 PM	Helium MFC set to  20.000000
8/14/2012	4:04:56 PM	H2 MFC set to  0.000000
8/14/2012	4:04:56 PM	BCl3 MFC set to  0.000000
8/14/2012	4:04:56 PM	PH3 MFC set to  0.000000
8/14/2012	4:04:56 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:04:56 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:04:56 PM	Tube furnace set to 0
8/14/2012	4:05:26 PM	Helium valve closed
8/14/2012	4:05:26 PM	H2 valve closed
8/14/2012	4:05:26 PM	BCl3 valve closed
8/14/2012	4:05:26 PM	PH3 valve closed
8/14/2012	4:05:26 PM	SiCl4 pre valve closed
8/14/2012	4:05:26 PM	SiCl4 post valve closed
8/14/2012	4:05:26 PM	Bypass valve closed
8/14/2012	4:05:26 PM	Bubbler valve closed
8/14/2012	4:05:26 PM	Main Vac valve opened
8/14/2012	4:05:26 PM	Helium MFC set to  0.000000
8/14/2012	4:05:26 PM	H2 MFC set to  0.000000
8/14/2012	4:05:26 PM	BCl3 MFC set to  0.000000
8/14/2012	4:05:26 PM	PH3 MFC set to  0.000000
8/14/2012	4:05:26 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:05:26 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:05:27 PM	Tube furnace set to 0
8/14/2012	4:05:57 PM	H2 valve closed
8/14/2012	4:05:57 PM	BCl3 valve closed
8/14/2012	4:05:57 PM	PH3 valve closed
8/14/2012	4:05:57 PM	SiCl4 pre valve closed
8/14/2012	4:05:57 PM	SiCl4 post valve closed
8/14/2012	4:05:57 PM	Bypass valve closed
8/14/2012	4:05:57 PM	Bubbler valve closed
8/14/2012	4:05:57 PM	Helium valve opened
8/14/2012	4:05:57 PM	Main Vac valve opened
8/14/2012	4:05:57 PM	Helium MFC set to  20.000000
8/14/2012	4:05:57 PM	H2 MFC set to  0.000000
8/14/2012	4:05:57 PM	BCl3 MFC set to  0.000000
8/14/2012	4:05:57 PM	PH3 MFC set to  0.000000
8/14/2012	4:05:57 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:05:57 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:05:57 PM	Tube furnace set to 0
8/14/2012	4:06:27 PM	Helium valve closed
8/14/2012	4:06:27 PM	H2 valve closed
8/14/2012	4:06:27 PM	BCl3 valve closed
8/14/2012	4:06:27 PM	PH3 valve closed
8/14/2012	4:06:27 PM	SiCl4 pre valve closed
8/14/2012	4:06:27 PM	SiCl4 post valve closed
8/14/2012	4:06:27 PM	Bypass valve closed
8/14/2012	4:06:27 PM	Bubbler valve closed
8/14/2012	4:06:27 PM	Main Vac valve opened
8/14/2012	4:06:27 PM	Helium MFC set to  0.000000
8/14/2012	4:06:27 PM	H2 MFC set to  0.000000
8/14/2012	4:06:27 PM	BCl3 MFC set to  0.000000
8/14/2012	4:06:27 PM	PH3 MFC set to  0.000000
8/14/2012	4:06:27 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:06:27 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:06:27 PM	Tube furnace set to 0
8/14/2012	4:06:57 PM	H2 valve closed
8/14/2012	4:06:57 PM	BCl3 valve closed
8/14/2012	4:06:57 PM	PH3 valve closed
8/14/2012	4:06:57 PM	SiCl4 pre valve closed
8/14/2012	4:06:57 PM	SiCl4 post valve closed
8/14/2012	4:06:57 PM	Bypass valve closed
8/14/2012	4:06:57 PM	Bubbler valve closed
8/14/2012	4:06:57 PM	Helium valve opened
8/14/2012	4:06:57 PM	Main Vac valve opened
8/14/2012	4:06:57 PM	Helium MFC set to  20.000000
8/14/2012	4:06:57 PM	H2 MFC set to  0.000000
8/14/2012	4:06:57 PM	BCl3 MFC set to  0.000000
8/14/2012	4:06:57 PM	PH3 MFC set to  0.000000
8/14/2012	4:06:57 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:06:57 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:06:57 PM	Tube furnace set to 0
8/14/2012	4:07:27 PM	Helium valve closed
8/14/2012	4:07:27 PM	H2 valve closed
8/14/2012	4:07:27 PM	BCl3 valve closed
8/14/2012	4:07:27 PM	PH3 valve closed
8/14/2012	4:07:27 PM	SiCl4 pre valve closed
8/14/2012	4:07:27 PM	SiCl4 post valve closed
8/14/2012	4:07:27 PM	Bypass valve closed
8/14/2012	4:07:27 PM	Bubbler valve closed
8/14/2012	4:07:27 PM	Main Vac valve opened
8/14/2012	4:07:27 PM	Helium MFC set to  0.000000
8/14/2012	4:07:27 PM	H2 MFC set to  0.000000
8/14/2012	4:07:27 PM	BCl3 MFC set to  0.000000
8/14/2012	4:07:27 PM	PH3 MFC set to  0.000000
8/14/2012	4:07:27 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:07:27 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:07:27 PM	Tube furnace set to 0
8/14/2012	4:07:57 PM	H2 valve closed
8/14/2012	4:07:57 PM	BCl3 valve closed
8/14/2012	4:07:58 PM	PH3 valve closed
8/14/2012	4:07:58 PM	SiCl4 pre valve closed
8/14/2012	4:07:58 PM	SiCl4 post valve closed
8/14/2012	4:07:58 PM	Bypass valve closed
8/14/2012	4:07:58 PM	Bubbler valve closed
8/14/2012	4:07:58 PM	Helium valve opened
8/14/2012	4:07:58 PM	Main Vac valve opened
8/14/2012	4:07:58 PM	Helium MFC set to  20.000000
8/14/2012	4:07:58 PM	H2 MFC set to  0.000000
8/14/2012	4:07:58 PM	BCl3 MFC set to  0.000000
8/14/2012	4:07:58 PM	PH3 MFC set to  0.000000
8/14/2012	4:07:58 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:07:58 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:07:58 PM	Tube furnace set to 0
8/14/2012	4:08:28 PM	Helium valve closed
8/14/2012	4:08:28 PM	H2 valve closed
8/14/2012	4:08:28 PM	BCl3 valve closed
8/14/2012	4:08:28 PM	PH3 valve closed
8/14/2012	4:08:28 PM	SiCl4 pre valve closed
8/14/2012	4:08:28 PM	SiCl4 post valve closed
8/14/2012	4:08:28 PM	Bypass valve closed
8/14/2012	4:08:28 PM	Bubbler valve closed
8/14/2012	4:08:28 PM	Main Vac valve opened
8/14/2012	4:08:28 PM	Helium MFC set to  0.000000
8/14/2012	4:08:28 PM	H2 MFC set to  0.000000
8/14/2012	4:08:28 PM	BCl3 MFC set to  0.000000
8/14/2012	4:08:28 PM	PH3 MFC set to  0.000000
8/14/2012	4:08:28 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:08:28 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:08:28 PM	Tube furnace set to 0
8/14/2012	4:08:58 PM	H2 valve closed
8/14/2012	4:08:58 PM	BCl3 valve closed
8/14/2012	4:08:58 PM	PH3 valve closed
8/14/2012	4:08:58 PM	SiCl4 pre valve closed
8/14/2012	4:08:58 PM	SiCl4 post valve closed
8/14/2012	4:08:58 PM	Bypass valve closed
8/14/2012	4:08:58 PM	Bubbler valve closed
8/14/2012	4:08:58 PM	Helium valve opened
8/14/2012	4:08:58 PM	Main Vac valve opened
8/14/2012	4:08:58 PM	Helium MFC set to  20.000000
8/14/2012	4:08:58 PM	H2 MFC set to  0.000000
8/14/2012	4:08:58 PM	BCl3 MFC set to  0.000000
8/14/2012	4:08:58 PM	PH3 MFC set to  0.000000
8/14/2012	4:08:58 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:08:58 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:08:58 PM	Tube furnace set to 0
8/14/2012	4:09:28 PM	Helium valve closed
8/14/2012	4:09:28 PM	H2 valve closed
8/14/2012	4:09:28 PM	BCl3 valve closed
8/14/2012	4:09:28 PM	PH3 valve closed
8/14/2012	4:09:28 PM	SiCl4 pre valve closed
8/14/2012	4:09:28 PM	SiCl4 post valve closed
8/14/2012	4:09:28 PM	Bypass valve closed
8/14/2012	4:09:28 PM	Bubbler valve closed
8/14/2012	4:09:28 PM	Main Vac valve opened
8/14/2012	4:09:28 PM	Helium MFC set to  0.000000
8/14/2012	4:09:28 PM	H2 MFC set to  0.000000
8/14/2012	4:09:28 PM	BCl3 MFC set to  0.000000
8/14/2012	4:09:28 PM	PH3 MFC set to  0.000000
8/14/2012	4:09:28 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:09:28 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:09:28 PM	Tube furnace set to 0
8/14/2012	4:09:58 PM	H2 valve closed
8/14/2012	4:09:58 PM	BCl3 valve closed
8/14/2012	4:09:58 PM	PH3 valve closed
8/14/2012	4:09:58 PM	SiCl4 pre valve closed
8/14/2012	4:09:58 PM	SiCl4 post valve closed
8/14/2012	4:09:58 PM	Bypass valve closed
8/14/2012	4:09:58 PM	Bubbler valve closed
8/14/2012	4:09:58 PM	Helium valve opened
8/14/2012	4:09:58 PM	Main Vac valve opened
8/14/2012	4:09:58 PM	Helium MFC set to  20.000000
8/14/2012	4:09:58 PM	H2 MFC set to  0.000000
8/14/2012	4:09:58 PM	BCl3 MFC set to  0.000000
8/14/2012	4:09:58 PM	PH3 MFC set to  0.000000
8/14/2012	4:09:58 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:09:58 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:09:59 PM	Tube furnace set to 0
8/14/2012	4:10:29 PM	Helium valve closed
8/14/2012	4:10:29 PM	H2 valve closed
8/14/2012	4:10:29 PM	BCl3 valve closed
8/14/2012	4:10:29 PM	PH3 valve closed
8/14/2012	4:10:29 PM	SiCl4 pre valve closed
8/14/2012	4:10:29 PM	SiCl4 post valve closed
8/14/2012	4:10:29 PM	Bypass valve closed
8/14/2012	4:10:29 PM	Bubbler valve closed
8/14/2012	4:10:29 PM	Main Vac valve opened
8/14/2012	4:10:29 PM	Helium MFC set to  0.000000
8/14/2012	4:10:29 PM	H2 MFC set to  0.000000
8/14/2012	4:10:29 PM	BCl3 MFC set to  0.000000
8/14/2012	4:10:29 PM	PH3 MFC set to  0.000000
8/14/2012	4:10:29 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:10:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:10:29 PM	Tube furnace set to 0
8/14/2012	4:10:59 PM	H2 valve closed
8/14/2012	4:10:59 PM	BCl3 valve closed
8/14/2012	4:10:59 PM	PH3 valve closed
8/14/2012	4:10:59 PM	SiCl4 pre valve closed
8/14/2012	4:10:59 PM	SiCl4 post valve closed
8/14/2012	4:10:59 PM	Bypass valve closed
8/14/2012	4:10:59 PM	Bubbler valve closed
8/14/2012	4:10:59 PM	Helium valve opened
8/14/2012	4:10:59 PM	Main Vac valve opened
8/14/2012	4:10:59 PM	Helium MFC set to  20.000000
8/14/2012	4:10:59 PM	H2 MFC set to  0.000000
8/14/2012	4:10:59 PM	BCl3 MFC set to  0.000000
8/14/2012	4:10:59 PM	PH3 MFC set to  0.000000
8/14/2012	4:10:59 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:10:59 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:10:59 PM	Tube furnace set to 0
8/14/2012	4:11:29 PM	Helium valve closed
8/14/2012	4:11:29 PM	H2 valve closed
8/14/2012	4:11:29 PM	BCl3 valve closed
8/14/2012	4:11:29 PM	PH3 valve closed
8/14/2012	4:11:29 PM	SiCl4 pre valve closed
8/14/2012	4:11:29 PM	SiCl4 post valve closed
8/14/2012	4:11:29 PM	Bypass valve closed
8/14/2012	4:11:29 PM	Bubbler valve closed
8/14/2012	4:11:29 PM	Main Vac valve opened
8/14/2012	4:11:29 PM	Helium MFC set to  0.000000
8/14/2012	4:11:29 PM	H2 MFC set to  0.000000
8/14/2012	4:11:29 PM	BCl3 MFC set to  0.000000
8/14/2012	4:11:29 PM	PH3 MFC set to  0.000000
8/14/2012	4:11:29 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:11:29 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:11:29 PM	Tube furnace set to 0
8/14/2012	4:11:59 PM	H2 valve closed
8/14/2012	4:11:59 PM	BCl3 valve closed
8/14/2012	4:11:59 PM	PH3 valve closed
8/14/2012	4:11:59 PM	SiCl4 pre valve closed
8/14/2012	4:11:59 PM	SiCl4 post valve closed
8/14/2012	4:11:59 PM	Bypass valve closed
8/14/2012	4:11:59 PM	Bubbler valve closed
8/14/2012	4:11:59 PM	Helium valve opened
8/14/2012	4:11:59 PM	Main Vac valve opened
8/14/2012	4:11:59 PM	Helium MFC set to  20.000000
8/14/2012	4:11:59 PM	H2 MFC set to  0.000000
8/14/2012	4:11:59 PM	BCl3 MFC set to  0.000000
8/14/2012	4:11:59 PM	PH3 MFC set to  0.000000
8/14/2012	4:11:59 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:11:59 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:12:00 PM	Tube furnace set to 0
8/14/2012	4:12:30 PM	Helium valve closed
8/14/2012	4:12:30 PM	H2 valve closed
8/14/2012	4:12:30 PM	BCl3 valve closed
8/14/2012	4:12:30 PM	PH3 valve closed
8/14/2012	4:12:30 PM	SiCl4 pre valve closed
8/14/2012	4:12:30 PM	SiCl4 post valve closed
8/14/2012	4:12:30 PM	Bypass valve closed
8/14/2012	4:12:30 PM	Bubbler valve closed
8/14/2012	4:12:30 PM	Main Vac valve opened
8/14/2012	4:12:30 PM	Helium MFC set to  0.000000
8/14/2012	4:12:30 PM	H2 MFC set to  0.000000
8/14/2012	4:12:30 PM	BCl3 MFC set to  0.000000
8/14/2012	4:12:30 PM	PH3 MFC set to  0.000000
8/14/2012	4:12:30 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:12:30 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:12:30 PM	Tube furnace set to 0
8/14/2012	4:13:00 PM	H2 valve closed
8/14/2012	4:13:00 PM	BCl3 valve closed
8/14/2012	4:13:00 PM	PH3 valve closed
8/14/2012	4:13:00 PM	SiCl4 pre valve closed
8/14/2012	4:13:00 PM	SiCl4 post valve closed
8/14/2012	4:13:00 PM	Bypass valve closed
8/14/2012	4:13:00 PM	Bubbler valve closed
8/14/2012	4:13:00 PM	Helium valve opened
8/14/2012	4:13:00 PM	Main Vac valve opened
8/14/2012	4:13:00 PM	Helium MFC set to  20.000000
8/14/2012	4:13:00 PM	H2 MFC set to  0.000000
8/14/2012	4:13:00 PM	BCl3 MFC set to  0.000000
8/14/2012	4:13:00 PM	PH3 MFC set to  0.000000
8/14/2012	4:13:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:13:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:13:00 PM	Tube furnace set to 0
8/14/2012	4:13:30 PM	Helium valve closed
8/14/2012	4:13:30 PM	H2 valve closed
8/14/2012	4:13:30 PM	BCl3 valve closed
8/14/2012	4:13:30 PM	PH3 valve closed
8/14/2012	4:13:30 PM	SiCl4 pre valve closed
8/14/2012	4:13:30 PM	SiCl4 post valve closed
8/14/2012	4:13:30 PM	Bypass valve closed
8/14/2012	4:13:30 PM	Bubbler valve closed
8/14/2012	4:13:30 PM	Main Vac valve opened
8/14/2012	4:13:30 PM	Helium MFC set to  0.000000
8/14/2012	4:13:30 PM	H2 MFC set to  0.000000
8/14/2012	4:13:30 PM	BCl3 MFC set to  0.000000
8/14/2012	4:13:30 PM	PH3 MFC set to  0.000000
8/14/2012	4:13:30 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:13:30 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:13:30 PM	Tube furnace set to 0
8/14/2012	4:14:00 PM	H2 valve closed
8/14/2012	4:14:00 PM	BCl3 valve closed
8/14/2012	4:14:00 PM	PH3 valve closed
8/14/2012	4:14:00 PM	SiCl4 pre valve closed
8/14/2012	4:14:00 PM	SiCl4 post valve closed
8/14/2012	4:14:00 PM	Bypass valve closed
8/14/2012	4:14:00 PM	Bubbler valve closed
8/14/2012	4:14:00 PM	Helium valve opened
8/14/2012	4:14:00 PM	Main Vac valve opened
8/14/2012	4:14:00 PM	Helium MFC set to  20.000000
8/14/2012	4:14:00 PM	H2 MFC set to  0.000000
8/14/2012	4:14:00 PM	BCl3 MFC set to  0.000000
8/14/2012	4:14:00 PM	PH3 MFC set to  0.000000
8/14/2012	4:14:00 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:14:00 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:14:01 PM	Tube furnace set to 0
8/14/2012	4:14:31 PM	Helium valve closed
8/14/2012	4:14:31 PM	H2 valve closed
8/14/2012	4:14:31 PM	BCl3 valve closed
8/14/2012	4:14:31 PM	PH3 valve closed
8/14/2012	4:14:31 PM	SiCl4 pre valve closed
8/14/2012	4:14:31 PM	SiCl4 post valve closed
8/14/2012	4:14:31 PM	Bypass valve closed
8/14/2012	4:14:31 PM	Bubbler valve closed
8/14/2012	4:14:31 PM	Main Vac valve opened
8/14/2012	4:14:31 PM	Helium MFC set to  0.000000
8/14/2012	4:14:31 PM	H2 MFC set to  0.000000
8/14/2012	4:14:31 PM	BCl3 MFC set to  0.000000
8/14/2012	4:14:31 PM	PH3 MFC set to  0.000000
8/14/2012	4:14:31 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:14:31 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:14:31 PM	Tube furnace set to 0
8/14/2012	4:14:32 PM	Run finished at 4:14 PM
8/14/2012	4:14:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/14/2012	4:16:34 PM	Recipe started at 4:16 PM
8/14/2012	4:16:34 PM	Helium valve closed
8/14/2012	4:16:34 PM	H2 valve closed
8/14/2012	4:16:34 PM	BCl3 valve closed
8/14/2012	4:16:34 PM	PH3 valve closed
8/14/2012	4:16:34 PM	SiCl4 pre valve closed
8/14/2012	4:16:34 PM	SiCl4 post valve closed
8/14/2012	4:16:34 PM	Main Vac valve closed
8/14/2012	4:16:34 PM	Bypass valve closed
8/14/2012	4:16:34 PM	Bubbler valve closed
8/14/2012	4:16:34 PM	Helium MFC set to  0.000000
8/14/2012	4:16:34 PM	H2 MFC set to  0.000000
8/14/2012	4:16:34 PM	BCl3 MFC set to  0.000000
8/14/2012	4:16:34 PM	PH3 MFC set to  0.000000
8/14/2012	4:16:34 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:16:34 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:16:34 PM	Tube furnace set to 0
8/14/2012	4:16:37 PM	Helium valve closed
8/14/2012	4:16:37 PM	BCl3 valve closed
8/14/2012	4:16:37 PM	PH3 valve closed
8/14/2012	4:16:37 PM	SiCl4 pre valve closed
8/14/2012	4:16:37 PM	SiCl4 post valve closed
8/14/2012	4:16:37 PM	Main Vac valve closed
8/14/2012	4:16:37 PM	Bypass valve closed
8/14/2012	4:16:37 PM	Bubbler valve closed
8/14/2012	4:16:37 PM	H2 valve opened
8/14/2012	4:16:37 PM	Helium MFC set to  0.000000
8/14/2012	4:16:37 PM	H2 MFC set to  500.000000
8/14/2012	4:16:37 PM	BCl3 MFC set to  0.000000
8/14/2012	4:16:37 PM	PH3 MFC set to  0.000000
8/14/2012	4:16:37 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:16:37 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:16:37 PM	Tube furnace set to 50
8/14/2012	4:17:51 PM	Helium valve closed
8/14/2012	4:17:51 PM	BCl3 valve closed
8/14/2012	4:17:51 PM	PH3 valve closed
8/14/2012	4:17:51 PM	SiCl4 pre valve closed
8/14/2012	4:17:51 PM	SiCl4 post valve closed
8/14/2012	4:17:51 PM	Main Vac valve closed
8/14/2012	4:17:51 PM	Bypass valve closed
8/14/2012	4:17:51 PM	H2 valve opened
8/14/2012	4:17:51 PM	Bubbler valve opened
8/14/2012	4:17:51 PM	Helium MFC set to  0.000000
8/14/2012	4:17:51 PM	H2 MFC set to  500.000000
8/14/2012	4:17:51 PM	BCl3 MFC set to  0.000000
8/14/2012	4:17:51 PM	PH3 MFC set to  0.000000
8/14/2012	4:17:51 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:17:51 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:17:51 PM	Tube furnace set to 50
8/14/2012	4:17:52 PM	Helium valve closed
8/14/2012	4:17:53 PM	BCl3 valve closed
8/14/2012	4:17:53 PM	PH3 valve closed
8/14/2012	4:17:53 PM	SiCl4 pre valve closed
8/14/2012	4:17:53 PM	SiCl4 post valve closed
8/14/2012	4:17:53 PM	Main Vac valve closed
8/14/2012	4:17:53 PM	Bypass valve closed
8/14/2012	4:17:53 PM	H2 valve opened
8/14/2012	4:17:53 PM	Bubbler valve opened
8/14/2012	4:17:53 PM	Helium MFC set to  0.000000
8/14/2012	4:17:53 PM	H2 MFC set to  500.000000
8/14/2012	4:17:53 PM	BCl3 MFC set to  0.000000
8/14/2012	4:17:53 PM	PH3 MFC set to  0.000000
8/14/2012	4:17:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:17:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:17:53 PM	Tube furnace set to 1000
8/14/2012	4:37:53 PM	Helium valve closed
8/14/2012	4:37:53 PM	BCl3 valve closed
8/14/2012	4:37:53 PM	PH3 valve closed
8/14/2012	4:37:53 PM	Main Vac valve closed
8/14/2012	4:37:53 PM	Bypass valve closed
8/14/2012	4:37:53 PM	H2 valve opened
8/14/2012	4:37:53 PM	SiCl4 pre valve opened
8/14/2012	4:37:53 PM	SiCl4 post valve opened
8/14/2012	4:37:53 PM	Bubbler valve opened
8/14/2012	4:37:53 PM	Helium MFC set to  0.000000
8/14/2012	4:37:53 PM	H2 MFC set to  500.000000
8/14/2012	4:37:53 PM	BCl3 MFC set to  0.000000
8/14/2012	4:37:53 PM	PH3 MFC set to  0.000000
8/14/2012	4:37:53 PM	SiCl4 MFC set to  50.000000
8/14/2012	4:37:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:37:53 PM	Tube furnace set to 1000
8/14/2012	4:57:53 PM	Helium valve closed
8/14/2012	4:57:53 PM	BCl3 valve closed
8/14/2012	4:57:53 PM	PH3 valve closed
8/14/2012	4:57:53 PM	SiCl4 pre valve closed
8/14/2012	4:57:53 PM	SiCl4 post valve closed
8/14/2012	4:57:53 PM	Main Vac valve closed
8/14/2012	4:57:53 PM	Bypass valve closed
8/14/2012	4:57:53 PM	H2 valve opened
8/14/2012	4:57:53 PM	Bubbler valve opened
8/14/2012	4:57:53 PM	Helium MFC set to  0.000000
8/14/2012	4:57:53 PM	H2 MFC set to  500.000000
8/14/2012	4:57:53 PM	BCl3 MFC set to  0.000000
8/14/2012	4:57:53 PM	PH3 MFC set to  0.000000
8/14/2012	4:57:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	4:57:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	4:57:53 PM	Tube furnace set to 950
8/14/2012	5:00:53 PM	Helium valve closed
8/14/2012	5:00:53 PM	BCl3 valve closed
8/14/2012	5:00:53 PM	PH3 valve closed
8/14/2012	5:00:53 PM	SiCl4 pre valve closed
8/14/2012	5:00:53 PM	SiCl4 post valve closed
8/14/2012	5:00:53 PM	Main Vac valve closed
8/14/2012	5:00:53 PM	Bypass valve closed
8/14/2012	5:00:53 PM	H2 valve opened
8/14/2012	5:00:53 PM	Bubbler valve opened
8/14/2012	5:00:53 PM	Helium MFC set to  0.000000
8/14/2012	5:00:53 PM	H2 MFC set to  500.000000
8/14/2012	5:00:53 PM	BCl3 MFC set to  0.000000
8/14/2012	5:00:53 PM	PH3 MFC set to  0.000000
8/14/2012	5:00:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:00:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:00:53 PM	Tube furnace set to 900
8/14/2012	5:03:53 PM	Helium valve closed
8/14/2012	5:03:53 PM	BCl3 valve closed
8/14/2012	5:03:53 PM	PH3 valve closed
8/14/2012	5:03:53 PM	SiCl4 pre valve closed
8/14/2012	5:03:53 PM	SiCl4 post valve closed
8/14/2012	5:03:53 PM	Main Vac valve closed
8/14/2012	5:03:53 PM	Bypass valve closed
8/14/2012	5:03:53 PM	H2 valve opened
8/14/2012	5:03:53 PM	Bubbler valve opened
8/14/2012	5:03:53 PM	Helium MFC set to  0.000000
8/14/2012	5:03:53 PM	H2 MFC set to  500.000000
8/14/2012	5:03:53 PM	BCl3 MFC set to  0.000000
8/14/2012	5:03:53 PM	PH3 MFC set to  0.000000
8/14/2012	5:03:53 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:03:53 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:03:54 PM	Tube furnace set to 850
8/14/2012	5:06:54 PM	Helium valve closed
8/14/2012	5:06:54 PM	BCl3 valve closed
8/14/2012	5:06:54 PM	PH3 valve closed
8/14/2012	5:06:54 PM	SiCl4 pre valve closed
8/14/2012	5:06:54 PM	SiCl4 post valve closed
8/14/2012	5:06:54 PM	Main Vac valve closed
8/14/2012	5:06:54 PM	Bypass valve closed
8/14/2012	5:06:54 PM	H2 valve opened
8/14/2012	5:06:54 PM	Bubbler valve opened
8/14/2012	5:06:54 PM	Helium MFC set to  0.000000
8/14/2012	5:06:54 PM	H2 MFC set to  500.000000
8/14/2012	5:06:54 PM	BCl3 MFC set to  0.000000
8/14/2012	5:06:54 PM	PH3 MFC set to  0.000000
8/14/2012	5:06:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:06:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:06:54 PM	Tube furnace set to 800
8/14/2012	5:09:54 PM	Helium valve closed
8/14/2012	5:09:54 PM	BCl3 valve closed
8/14/2012	5:09:54 PM	PH3 valve closed
8/14/2012	5:09:54 PM	SiCl4 pre valve closed
8/14/2012	5:09:54 PM	SiCl4 post valve closed
8/14/2012	5:09:54 PM	Main Vac valve closed
8/14/2012	5:09:54 PM	Bypass valve closed
8/14/2012	5:09:54 PM	H2 valve opened
8/14/2012	5:09:54 PM	Bubbler valve opened
8/14/2012	5:09:54 PM	Helium MFC set to  0.000000
8/14/2012	5:09:54 PM	H2 MFC set to  500.000000
8/14/2012	5:09:54 PM	BCl3 MFC set to  0.000000
8/14/2012	5:09:54 PM	PH3 MFC set to  0.000000
8/14/2012	5:09:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:09:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:09:54 PM	Tube furnace set to 750
8/14/2012	5:12:54 PM	H2 valve closed
8/14/2012	5:12:54 PM	BCl3 valve closed
8/14/2012	5:12:54 PM	PH3 valve closed
8/14/2012	5:12:54 PM	SiCl4 pre valve closed
8/14/2012	5:12:54 PM	SiCl4 post valve closed
8/14/2012	5:12:54 PM	Main Vac valve closed
8/14/2012	5:12:54 PM	Bypass valve closed
8/14/2012	5:12:54 PM	Helium valve opened
8/14/2012	5:12:54 PM	Bubbler valve opened
8/14/2012	5:12:54 PM	Helium MFC set to  400.000000
8/14/2012	5:12:54 PM	H2 MFC set to  0.000000
8/14/2012	5:12:54 PM	BCl3 MFC set to  0.000000
8/14/2012	5:12:54 PM	PH3 MFC set to  0.000000
8/14/2012	5:12:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:12:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:12:54 PM	Tube furnace set to 0
8/14/2012	5:37:54 PM	Helium valve closed
8/14/2012	5:37:54 PM	H2 valve closed
8/14/2012	5:37:54 PM	BCl3 valve closed
8/14/2012	5:37:54 PM	PH3 valve closed
8/14/2012	5:37:54 PM	SiCl4 pre valve closed
8/14/2012	5:37:54 PM	SiCl4 post valve closed
8/14/2012	5:37:54 PM	Main Vac valve closed
8/14/2012	5:37:54 PM	Bypass valve closed
8/14/2012	5:37:54 PM	Bubbler valve closed
8/14/2012	5:37:54 PM	Helium MFC set to  0.000000
8/14/2012	5:37:54 PM	H2 MFC set to  0.000000
8/14/2012	5:37:54 PM	BCl3 MFC set to  0.000000
8/14/2012	5:37:54 PM	PH3 MFC set to  0.000000
8/14/2012	5:37:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:37:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:37:54 PM	Tube furnace set to 50
8/14/2012	5:42:54 PM	Helium valve closed
8/14/2012	5:42:54 PM	H2 valve closed
8/14/2012	5:42:54 PM	BCl3 valve closed
8/14/2012	5:42:54 PM	PH3 valve closed
8/14/2012	5:42:54 PM	SiCl4 pre valve closed
8/14/2012	5:42:54 PM	SiCl4 post valve closed
8/14/2012	5:42:54 PM	Main Vac valve closed
8/14/2012	5:42:54 PM	Bubbler valve closed
8/14/2012	5:42:54 PM	Bypass valve opened
8/14/2012	5:42:54 PM	Helium MFC set to  0.000000
8/14/2012	5:42:54 PM	H2 MFC set to  0.000000
8/14/2012	5:42:54 PM	BCl3 MFC set to  0.000000
8/14/2012	5:42:54 PM	PH3 MFC set to  0.000000
8/14/2012	5:42:54 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:42:54 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:42:55 PM	Tube furnace set to 0
8/14/2012	5:43:52 PM	Helium valve closed
8/14/2012	5:43:52 PM	H2 valve closed
8/14/2012	5:43:52 PM	BCl3 valve closed
8/14/2012	5:43:52 PM	PH3 valve closed
8/14/2012	5:43:52 PM	SiCl4 pre valve closed
8/14/2012	5:43:52 PM	SiCl4 post valve closed
8/14/2012	5:43:52 PM	Bypass valve closed
8/14/2012	5:43:52 PM	Bubbler valve closed
8/14/2012	5:43:52 PM	Main Vac valve opened
8/14/2012	5:43:52 PM	Helium MFC set to  0.000000
8/14/2012	5:43:52 PM	H2 MFC set to  0.000000
8/14/2012	5:43:52 PM	BCl3 MFC set to  0.000000
8/14/2012	5:43:52 PM	PH3 MFC set to  0.000000
8/14/2012	5:43:52 PM	SiCl4 MFC set to  0.000000
8/14/2012	5:43:52 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	5:43:53 PM	Tube furnace set to 0
8/14/2012	5:43:54 PM	Run finished at 5:43 PM
8/14/2012	6:22:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	6:22:21 PM	Recipe started at 6:22 PM
8/14/2012	6:22:21 PM	Helium valve closed
8/14/2012	6:22:21 PM	H2 valve closed
8/14/2012	6:22:21 PM	BCl3 valve closed
8/14/2012	6:22:21 PM	PH3 valve closed
8/14/2012	6:22:21 PM	SiCl4 pre valve closed
8/14/2012	6:22:21 PM	SiCl4 post valve closed
8/14/2012	6:22:21 PM	Main Vac valve closed
8/14/2012	6:22:21 PM	Bypass valve closed
8/14/2012	6:22:21 PM	Bubbler valve closed
8/14/2012	6:22:21 PM	Helium MFC set to  0.000000
8/14/2012	6:22:21 PM	H2 MFC set to  0.000000
8/14/2012	6:22:21 PM	BCl3 MFC set to  0.000000
8/14/2012	6:22:21 PM	PH3 MFC set to  0.000000
8/14/2012	6:22:21 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:22:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:22:21 PM	Tube furnace set to 0
8/14/2012	6:22:24 PM	H2 valve closed
8/14/2012	6:22:24 PM	BCl3 valve closed
8/14/2012	6:22:24 PM	PH3 valve closed
8/14/2012	6:22:24 PM	SiCl4 pre valve closed
8/14/2012	6:22:24 PM	SiCl4 post valve closed
8/14/2012	6:22:24 PM	Main Vac valve closed
8/14/2012	6:22:24 PM	Bypass valve closed
8/14/2012	6:22:24 PM	Bubbler valve closed
8/14/2012	6:22:24 PM	Helium valve opened
8/14/2012	6:22:24 PM	Helium MFC set to  500.000000
8/14/2012	6:22:24 PM	H2 MFC set to  0.000000
8/14/2012	6:22:24 PM	BCl3 MFC set to  0.000000
8/14/2012	6:22:24 PM	PH3 MFC set to  0.000000
8/14/2012	6:22:24 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:22:24 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:22:24 PM	Tube furnace set to 0
8/14/2012	6:23:30 PM	Helium valve closed
8/14/2012	6:23:30 PM	H2 valve closed
8/14/2012	6:23:30 PM	BCl3 valve closed
8/14/2012	6:23:30 PM	PH3 valve closed
8/14/2012	6:23:30 PM	SiCl4 pre valve closed
8/14/2012	6:23:30 PM	SiCl4 post valve closed
8/14/2012	6:23:30 PM	Main Vac valve closed
8/14/2012	6:23:30 PM	Bypass valve closed
8/14/2012	6:23:30 PM	Bubbler valve closed
8/14/2012	6:23:30 PM	Helium MFC set to  0.000000
8/14/2012	6:23:30 PM	H2 MFC set to  0.000000
8/14/2012	6:23:30 PM	BCl3 MFC set to  0.000000
8/14/2012	6:23:30 PM	PH3 MFC set to  0.000000
8/14/2012	6:23:30 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:23:30 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:23:30 PM	Tube furnace set to 0
8/14/2012	6:23:32 PM	Run finished at 6:23 PM
8/14/2012	6:23:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/14/2012	6:28:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/14/2012	6:28:57 PM	Recipe started at 6:28 PM
8/14/2012	6:28:57 PM	Helium valve closed
8/14/2012	6:28:57 PM	H2 valve closed
8/14/2012	6:28:57 PM	BCl3 valve closed
8/14/2012	6:28:57 PM	PH3 valve closed
8/14/2012	6:28:57 PM	SiCl4 pre valve closed
8/14/2012	6:28:57 PM	SiCl4 post valve closed
8/14/2012	6:28:57 PM	Main Vac valve closed
8/14/2012	6:28:57 PM	Bubbler valve closed
8/14/2012	6:28:57 PM	Bypass valve opened
8/14/2012	6:28:57 PM	Helium MFC set to  0.000000
8/14/2012	6:28:57 PM	H2 MFC set to  0.000000
8/14/2012	6:28:57 PM	BCl3 MFC set to  0.000000
8/14/2012	6:28:57 PM	PH3 MFC set to  0.000000
8/14/2012	6:28:57 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:28:57 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:28:57 PM	Tube furnace set to 0
8/14/2012	6:30:21 PM	Helium valve closed
8/14/2012	6:30:21 PM	H2 valve closed
8/14/2012	6:30:21 PM	BCl3 valve closed
8/14/2012	6:30:21 PM	PH3 valve closed
8/14/2012	6:30:21 PM	SiCl4 pre valve closed
8/14/2012	6:30:21 PM	SiCl4 post valve closed
8/14/2012	6:30:21 PM	Main Vac valve closed
8/14/2012	6:30:21 PM	Bubbler valve closed
8/14/2012	6:30:21 PM	Bypass valve opened
8/14/2012	6:30:21 PM	Helium MFC set to  0.000000
8/14/2012	6:30:21 PM	H2 MFC set to  0.000000
8/14/2012	6:30:21 PM	BCl3 MFC set to  0.000000
8/14/2012	6:30:21 PM	PH3 MFC set to  0.000000
8/14/2012	6:30:21 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:30:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:30:21 PM	Tube furnace set to 0
8/14/2012	6:31:21 PM	Helium valve closed
8/14/2012	6:31:21 PM	H2 valve closed
8/14/2012	6:31:21 PM	BCl3 valve closed
8/14/2012	6:31:21 PM	PH3 valve closed
8/14/2012	6:31:21 PM	SiCl4 pre valve closed
8/14/2012	6:31:21 PM	SiCl4 post valve closed
8/14/2012	6:31:21 PM	Bypass valve closed
8/14/2012	6:31:21 PM	Bubbler valve closed
8/14/2012	6:31:21 PM	Main Vac valve opened
8/14/2012	6:31:21 PM	Helium MFC set to  0.000000
8/14/2012	6:31:21 PM	H2 MFC set to  0.000000
8/14/2012	6:31:21 PM	BCl3 MFC set to  0.000000
8/14/2012	6:31:21 PM	PH3 MFC set to  0.000000
8/14/2012	6:31:21 PM	SiCl4 MFC set to  0.000000
8/14/2012	6:31:21 PM	Bypass solenoid MFC set to  0.000000
8/14/2012	6:31:21 PM	Tube furnace set to 0
8/14/2012	6:31:22 PM	Run finished at 6:31 PM
8/14/2012	6:31:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
